2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)
DOI: 10.1109/mwsym.2002.1012228
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A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications

Yong-Shik Lee
1
,
J.P. Becker
2
,
J.R. East
3
et al.
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