A micromachined piezoresistive accelerometer with high sensitivity: design and modelling

Lim, Myo–Taeg; Du, Hongliang; Su, Chengxun; Jin, W. L.

doi:10.1016/s0167-9317(99)00447-5

Cited by 38 publications

(16 citation statements)

References 12 publications

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“…There are several mechanisms for acceleration sensing viz., piezoelectric (Okada 1995), piezoresistive (Roylance and Angell 1979;Allen et al 1989;Plaza et al 1998;Pak et al 1996;Wang et al 2003;Patridge et al 2000;Lim et al 1999;Sim et al 1998;Kwon and Park 1998;Ning et al 1995;Chen et al 1997;Eklund and Shkel 2007;Amarasinghe et al 2006;Kal et al 2006), capacitive (Butefisch et al 2000;Yazadi et al 2003;Wang et al 2007;Rödjegård et al 2005;Takao et al 2001), tunneling (Dong et al 2005), vibrating beam/resonant beam (Aikele et al 2001;Tabata and Yamamoto 1999;Burns et al 1996), etc. Even though each of the above acceleration sensing mechanisms has its own advantages and limitations, piezoresistive accelerometers are widely used due to its structural simplicity, simple fabrication process and read out circuit compared to the other accelerometers.…”

Section: Introductionmentioning

confidence: 99%

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

2008

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This paper presents realization of a MEMS piezoresistive single axis accelerometer using dual doped TMAH solution. The silicon micromachined structure consists of a heavy proofmass supported by four thin flexures and sandwiched between top and bottom glass plates. Boron diffused piezoresistors located near fixed points of the flexure are used for sensing the developed stress due to applied acceleration. Based on the initial results an improved design has also been considered to achieve reduced cross-axis sensitivity and nonlinearity. The fabricated sensor tested upto 13 g acceleration shows average sensitivity of 0.556 mV/g along normal to the proofmass plane. The measured cross-axis sensitivity was 3.272 lV/g for X-axis and 3.442 lV/g for Y-axis which is less than 1% of Z-axis sensitivity. Comparing two designs there was an improvement of 63% sensitivity along Y-axis for the design with flexures placed along the proofmass edges.

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Section: Introductionmentioning

confidence: 99%

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

2008

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“…The majority of sensor designs utilize the displacement of an elastically suspended proof mass in relation to a fixed mass to determine acceleration or tilt. This displacement may then be measured using a diverse range of sensors including capacitive [2], piezoelectric [3], piezoresistive [4] and magnetoresistive [5].…”

Section: Introductionmentioning

confidence: 99%

Linear angle measurement using continuous wave ultrasonic oscillator

Popejoy

Alzebda

Sonbul

et al. 2012

2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings

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We investigated the possibility of linear angle measurement of a vessel using a pair of partially submerged ultrasound transducers mounted on its walls. Measurements of the transfer function at different tilts of the vessel showed noticeable changes both in magnitude and phase responses. These changes were found easiest to track from the output frequency of an oscillator formed by using the transducers in a positive feedback loop. The output frequency depended on the tilt parabolically and its relative scatter was found lower compared to that of the angular output of an industrial accelerometer. The achieved output frequency capture rate of 150 measurements per second enabled meaningful tracking of dynamic changes of the test rig tilt in real time.

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“…Aimed at achieving pure axial deformation in the sensing beams, a modified structure was proposed (Lim et al 1999). The structure was three separate pieces bonded together.…”

Section: Introductionmentioning

confidence: 99%

A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives

Yuan

Shao

2010

Microsyst Technol

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A miniature in-plane pizoresistive MEMS accelerometer was designed, fabricated and characterized for detection of slider off-track motion in hard disk drives. The structure of the accelerometer consists of a central supporting beam and two stress-magnifying sensing beams. Under geometric constraints imposed by the trailing side of a pico slider, the accelerometer design was optimized to achieve approximately pure axial deformation in the sensing beams and a maximum sensitivity with a specified natural frequency of 300 kHz. Fabricated on a silicon-oninsulator (SOI) wafer, the accelerometer with a half Wheatstone bridge was wirebonded to external pads and interfaced with an amplifier circuit on a printed circuit board (PCB). The noise level, sensitivity, nonlinearity were characterized with vibration testing on a shaker. The miniature accelerometer (1 9 0.3 9 0.3 mm 3 ) with a weight of only 0.2 mg offers a much higher resonant frequency with a comparable sensitivity compared with those in previous work.

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A micromachined piezoresistive accelerometer with high sensitivity: design and modelling

Cited by 38 publications

References 12 publications

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer

Linear angle measurement using continuous wave ultrasonic oscillator

A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives

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