A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

doi:10.3390/s16081286

Cited by 8 publications

(4 citation statements)

References 22 publications

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“…The outputs increase as the ratio goes up. Furthermore, according to Cao, [41] the larger PVDF appears to result in larger variation in the output voltage. Therefore, the largest PVDF, with the same length as the beam, was selected for the following tests.…”

Section: Optimization Of the Pvdf Setupmentioning

confidence: 95%

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A Self‐Powered Flow Velocity Sensing System Based on Hybrid Piezo‐Triboelectric Nanogenerator

et al. 2022

Adv Materials Technologies

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Monitoring the flow velocity of an urban ventilation system has great significance for air circulation and air quality. In this study, a self‐powered flow velocity sensor based on hybrid piezo‐triboelectric nanogenerator (P‐TENG) is proposed. The flow velocity is detected by a triboelectric nanogenerator (TENG) working in freestanding triboelectric‐layer mode. A polyvinylidene difluoride (PVDF) fixed on the galloping beam converts the kinetic energy of the moving air into electricity. Both the TENG and PVDF are driven by the galloping vibration of a bluff body arisen from the air flow of ventilation. The structure of the P‐TENG is provided and a prototype is fabricated. The experiments indicate that the PVDF can generate 2.4 µW of energy across an external resistance of 60 MΩ. Flow velocity ranging from 4 to 10 m s−1 can be well detected by the proposed nanogenerator. Moreover, the P‐TENG is applicable to a critical environment with humidity up to 75%. Demonstration is carried out on a wind tunnel, illustrating good reliability as the frequency remains stable for the whole duration. Compared with the commercial anemometer, the error rate is under 1% after calibration. The proposed P‐TENG promises in low cost, self‐powered flow velocity monitoring in urban ventilation systems.

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Section: Optimization Of the Pvdf Setupmentioning

confidence: 95%

“…This means the PVDF had the greatest deformation at the fixed end. Cao et al [41] studied the effect of sensor position. They found that when the PVDF located was closed to the fixed end, a higher peak voltage was generated, which is the same tendency as the results shown in the figure.…”

Section: Optimization Of the Pvdf Setupmentioning

confidence: 99%

A Self‐Powered Flow Velocity Sensing System Based on Hybrid Piezo‐Triboelectric Nanogenerator

et al. 2022

Adv Materials Technologies

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“…Therefore, externally attached flexible electronics are likely to be exposed to various environmental stimuli such as humidity, gas, and temperature, as well as the strain introduced in the previous chapter. Humidity, gas, and temperature affect the electrical and chemical characteristics of electronics, such as electrical conductivity, luminous efficiency, and gas response, resulting in changes of a flexible electronics' performance [102][103][104][105][106][107][108][109]. In addition, the low gas permeability of flexible electronics can cause problems such as infections when used on the skin of a human body, further limiting its applications [110][111][112][113].…”

Section: Reliable Electronics For Harsh Environmentsmentioning

confidence: 99%

A review of geometric and structural design for reliable flexible electronics

Yoo

Yang

Chung

et al. 2021

J. Micromech. Microeng.

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Recently, flexible electronics have attracted significant attention as they can be integrated on diverse platforms from curved to flexible surfaces. As flexible electronics are used on a curved surface of wearable or manufacturing devices for health and system monitoring, the working environment of such applications forces electronics to be exposed to diverse stimuli such as deformation, temperature, humidity, and gas, resulting in performance changes. Therefore, rather than research on improving the specific performance of electronics, research on maintaining a stable performance in various environmental stimuli has been receiving tremendous interest. Reflecting the latest research trends, this paper introduces efforts in structural designs heading for both improving and maintaining the performance of flexible electronics in diverse environmental stimuli. Firstly, we will sequentially explain the geometric and structural designs introduced for achieving (a) reliable electronics insensitive to undesired mechanical stimuli, (b) reliable electronics in harsh environments, and (c) flexible electrodes. Also, (d) diverse applications of reliable and flexible electronics are introduced. Finally, a perspective on reliable and flexible electronic devices has been presented for suggesting next-generation research.

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“…Many efforts have been made to improve the pressure sensor's characteristic properties. Coating an n-type shield layer over p-type piezo resistors to counteract drift caused by electrical fields and temperature [5]. SOI (Silicon On Insulator) wafer-based pressure sensors came into existence to get a very low temperature coefficient of gauge factor [6,7].…”

Section: Introductionmentioning

confidence: 99%

Advancement in Micromachining Techniques of MEMS Piezoresistive Pressure Sensors to Minimize Offset Drift Due to Humidity and Temperature

Rudrappa Deepu,

Pavithra,

Manjunatha Nayak

et al. 2024

Micromachining - New Trends and Applications

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The present chapter focuses on the micromachining technology advancement to enhance the silicon micromachined piezoresistive pressure sensor’s output characteristics. The differential pressure sensors with a glass bond or a passivation layer of Cr/Au metals at the device’s rear side are fabricated using MEMS techniques. The sensors with modifications can minimize and almost eliminate the absorption/adsorption of moisture content on the sensor surface for a long time, indicating improved device performance. The effect of atmospheric temperature and humidity on the four piezo resistors and the sensor’s drift is investigated in this chapter, highlighting the challenges involved in glass micromachining techniques, including wet etching, sandblasting, and electrochemical discharge machining (ECDM). Ultimately, the fabricated sensor’s pressure calibration and offset drift values are studied due to atmospheric effects being reported.

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A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

Cited by 8 publications

References 22 publications

A Self‐Powered Flow Velocity Sensing System Based on Hybrid Piezo‐Triboelectric Nanogenerator

A Self‐Powered Flow Velocity Sensing System Based on Hybrid Piezo‐Triboelectric Nanogenerator

A review of geometric and structural design for reliable flexible electronics

Advancement in Micromachining Techniques of MEMS Piezoresistive Pressure Sensors to Minimize Offset Drift Due to Humidity and Temperature

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