A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons

Platinum Micro-Hotplates on Thermal Insulated Structure for Micro-Thermoelectric Gas Sensor

“…The µ-THS with the heat spreader has a voltage signal (temperature change ∆T A-B ) response approximately 4 times (3 times respectively) lower than the µ-THS without the heat spreader. The silicon heat spreader is known to improve the gas sensitivity and selectivity because of a better uniformity of the heat distribution in the membrane and also less degradation of the micro-hotplate meander due to hot spots (5) (11) . For the µ-THS, the heat spreader reduces the local temperature distribution around the micro-hotplate and also ∆T A-B resulting in the signal decrease observed in Fig.…”

Detection of SO2 and H2S in CO2 stream by means of WO3-based micro-hotplate sensors

“…An integrated sensor with an array of four microsensor elements was designed using finite element analysis [17] to achieve reduced power consumption, and constructed using microelectronic fabrication technology. The devices were fabricated on double-side polished p-type 1 0 0 Si substrates 300 m thick.…”

Membrane-suspended microgrid as a gas preconcentrator for chromatographic applications

“…In the present case, isolation of the structure from the bonding area has been ensured by setting a lateral air gap of 500 m under the connecting membrane [11]. Pyrex glass has been used to seal the silicon structure in both faces.…”