A microplasma chip for radical monitor

Sato, Ryoto; Yasumatsu, Daisuke; Kumagai, Shinya; Hori, Masaru; Sasaki, Minoru

doi:10.1109/omn.2013.6659050

2013 International Conference on Optical MEMS and Nanophotonics (OMN) 2013

DOI: 10.1109/omn.2013.6659050

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A microplasma chip for radical monitor

Ryoto Sato

Daisuke Yasumatsu

Shinya Kumagai

et al.

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A microplasma chip for radical monitor

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