2021
DOI: 10.3390/s21020632
|View full text |Cite
|
Sign up to set email alerts
|

A Microvalve Module with High Chemical Inertness and Embedded Flow Heating for Microscale Gas Chromatography

Abstract: This paper reports a multi-valve module with high chemical inertness and embedded flow heating for microscale gas chromatography (µGC) systems. The multi-valve module incorporates a monolithically microfabricated die stack, polyimide valve membranes, and solenoid actuators. The design incorporates three valves within a single module of volume 30.2 cm3, which is suitable for the small form factor of µGC systems. The die stack uses fused silica wafers and polyimide valve membranes that enhance chemical inertness… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
4

Relationship

2
2

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 43 publications
0
2
0
Order By: Relevance
“…Each microvalve incorporated a prefabricated polyimide valve membrane which was actuated by a latching solenoid actuator (#151082-234, Ledex, CA, USA). Each valve module was housed within a custom housing 3D-printed from Ultem 1010 [ 50 ].…”
Section: Design and Implementationmentioning
confidence: 99%
“…Each microvalve incorporated a prefabricated polyimide valve membrane which was actuated by a latching solenoid actuator (#151082-234, Ledex, CA, USA). Each valve module was housed within a custom housing 3D-printed from Ultem 1010 [ 50 ].…”
Section: Design and Implementationmentioning
confidence: 99%
“…The analytical performance of a μGC can be affected by the valves located in critical segments of the flow path connecting the sample inlet, the preconcentrator, the separation columns, and the detectors. Some systems incorporate inert and even heated microvalves, , which require specialized fabrication and assembly. Some systems have used Dean’s switches or eliminated valves by merging the sampling and separation flow paths and using a bidirectional pump to provide the sampling and separation flow .…”
mentioning
confidence: 99%