A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

Jerman, J.H.; Clift, D.J.; Mallinson, S.R.

doi:10.1109/solsen.1990.109839

Cited by 29 publications

(7 citation statements)

References 4 publications

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“…Usually, the gap width is tuned to achieve the desired wavelength and operate the device as a wavelength selector or monochromator. Tunable devices with a gap width that is variable by electrostatic actuation via electrodes on movable micromachined parts (Figure 2b) have been reported by several groups (46)(47)(48)(49)(50). Such devices operate preferably in the near-infrared region at wavelengths longer than 1 μm, where silicon substrates become transparent.…”

Section: R Ementioning

confidence: 83%

Adaptive Microsensor Systems

Gutierrez‐Osuna

Hierlemann

2010

Annual Rev. Anal. Chem.

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We provide a broad review of approaches for developing chemosensor systems whose operating parameters can adapt in response to environmental changes or application needs. Adaptation may take place at the instrumentation level (e.g., tunable sensors) and at the data-analysis level (e.g., adaptive classifiers). We discuss several strategies that provide tunability at the device level: modulation of internal sensing parameters, such as frequencies and operation voltages; variation of external parameters, such as exposure times and catalysts; and development of compact microanalysis systems with multiple tuning options. At the data-analysis level, we consider adaptive filters for change, interference, and drift rejection; pattern classifiers that can adapt to changes in the statistical properties of training data; and active-sensing techniques that can tune sensing parameters in real time. We conclude with a discussion of future opportunities for adaptive sensing in wireless distributed sensor systems.

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Section: R Ementioning

confidence: 83%

Adaptive Microsensor Systems

Gutierrez‐Osuna

Hierlemann

2010

Annual Rev. Anal. Chem.

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“…The pressure-sensitive probe of the hybrid fiber-optic F–P sensor is shown in Figure 2a. According to the principle of elasticity, the relationship of center deflection ( L ) of pressure-sensitive membrane and the pressure ( P ) applied on it is [26] as follows: L=3P(1−μ2)16Eh3(R2−r2)2 where μ and E are the Poisson’s ratio and Young’s modulus of pressure-sensitive membrane, respectively; h and R are the thickness and radius of pressure-sensitive membrane; and r gives the radius of pressure-sensitive membrane [27,28].…”

Section: Theory and Experimentsmentioning

confidence: 99%

Hybrid Fiber Optic Sensor, Based on the Fabry–Perot Interference, Assisted with Fluorescent Material for the Simultaneous Measurement of Temperature and Pressure

Jiang

Lin

Huang

et al. 2019

Sensors

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Herein we design a fiber sensor able to simultaneously measure the temperature and the pressure under harsh conditions, such as strong electromagnetic interference and high pressure. It is built on the basis of the fiber-optic Fabry–Perot (F–P) interference and the temperature sensitive mechanism of fluorescent materials. Both halogen lamps and light-emitting diodes (LED) are employed as the excitation light source. The reflected light from the sensor contains the low coherent information of interference cavity and the fluorescent lifetime. This information is independent due to the separate optical path and the different demodulation device. It delivers the messages of pressure and temperature, respectively. It is demonstrated that the sensor achieved pressure measurement at the range of 120–400 KPa at room temperature with a sensitivity of 1.5 nm/KPa. Moreover, the linearity of pressure against the cavity length variation was over 99.9%. In the meantime, a temperature measurement in the range of 25–80 °C, with a sensitivity of 0.0048 ms/°C, was obtained. These experimental results evince that this kind of sensor has a simple configuration, low-cost, and easy fabrication. As such, it can be particularly applied to many fields.

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“…The compact dimensions of the fiber-optic sensors significantly improve the spatial resolution of measurements and, in the case of medical applications, patients’ comfort level. The various types of miniature optic sensors reported in the literature are based on the Fabry–Perot optical cavity [3,4,5,6,7,8,9,10,11,12,13,14,15,16]. An extrinsic Fabry–Perot (FP) cavity is formed at the tip of an optical fiber by using the end of the optical fiber surface and a reflective miniature diaphragm built on a support structure.…”

Section: Introductionmentioning

confidence: 99%

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives

Bae

Giri

Kolawole

et al. 2019

Sensors

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Diamond is a good candidate for harsh environment sensing due to its high melting temperature, Young’s modulus, and thermal conductivity. A sensor made of diamond will be even more promising when combined with some advantages of optical sensing (i.e., EMI inertness, high temperature operation, and miniaturization). We present a miniature diamond-based fiber optic pressure sensor fabricated using dual polymer-ceramic adhesives. The UV curable polymer and the heat-curing ceramic adhesive are employed for easy and reliable optical fiber mounting. The usage of the two different adhesives considerably improves the manufacturability and linearity of the sensor, while significantly decreasing the error from the temperature cross-sensitivity. Experimental study shows that the sensor exhibits good linearity over a pressure range of 2.0–9.5 psi with a sensitivity of 18.5 nm/psi (R2 = 0.9979). Around 275 °C of working temperature was achieved by using polymer/ceramic dual adhesives. The sensor can benefit many fronts that require miniature, low-cost, and high-accuracy sensors including biomedical and industrial applications. With an added antioxidation layer on the diamond diaphragm, the sensor can also be applied for harsh environment applications due to the high melting temperature and Young’s modulus of the material.

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A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

Cited by 29 publications

References 4 publications

Adaptive Microsensor Systems

Adaptive Microsensor Systems

Hybrid Fiber Optic Sensor, Based on the Fabry–Perot Interference, Assisted with Fluorescent Material for the Simultaneous Measurement of Temperature and Pressure

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives

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