A miniaturized acoustic vector sensor with PIN-PMN-PT single crystal cantilever beam accelerometers

Cho, Yohan; Je, Yub; Jeong, Weui-Bong

doi:10.1051/aacus/2020017

Cited by 8 publications

(3 citation statements)

References 14 publications

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“…Without the thorough understanding of the working mechanisms of embedded PVDF, its output lacks a clear physical meaning. Therefore, in many current applications, embedded PVDF can only be used as an auxiliary to other sensors [ 10 , 11 ], and its output can only be analyzed qualitatively [ 12 ]. This difficulty in interpreting the output of embedded PVDF sensors has limited its use as a sensor.…”

Section: Introductionmentioning

confidence: 99%

The Use of a PVDF Array to Measure the Stress Field Inside an Elastic Material

Jin

Matthews

Wang

2023

Sensors

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This paper reports a series of experimental and modeling investigations on two piezoelectric arrays made of polyvinylidene fluoride (PVDF) films. They were embedded inside rubber cylinders and used to directly measure the internal stresses generated by various external excitations applied to the top surface of the cylinder. Corresponding finite element (FE) models were established to reveal the relationship between the PVDF output and the stress field applied to it. This research improves the understanding of the output mechanism of the embedded PVDF and provides useful information for the design of PVDF sensors.

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Section: Introductionmentioning

confidence: 99%

The Use of a PVDF Array to Measure the Stress Field Inside an Elastic Material

Jin

Matthews

Wang

2023

Sensors

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“…It should be noted that a single hydrophone can only test directivity in one direction. In 2020, Cho et al [ 26 ] developed a PIN-PMN-PT piezoelectric accelerometer for vector hydrophone. Results showed the sensitivity of the accelerometer and hydrophone to be −199 dB and −196 dB, respectively.…”

Section: Introductionmentioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

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“…In recent studies [ 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ], relaxor-PT single crystals such as Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PMN-PT) and Pb(Zn 1/3 Nb 2/3 )O 3 -PbTiO 3 (PZN-PT) have been investigated as active materials for composites. Single crystals exhibit superior piezoelectric properties compared to PZT ceramics; for example, they have piezoelectric coefficients d over 1500 pC/N and electromechanical coupling factors k 33 around 0.90 [ 27 , 28 , 29 ]. Therefore, it is expected that single crystals can further improve the sensitivity, source level, and frequency bandwidth when used as the active material of the composite.…”

Section: Introductionmentioning

confidence: 99%

Theoretical and Experimental Studies on Sensitivity and Bandwidth of Thickness-Mode Driving Hydrophone Utilizing A 2-2 Piezoelectric Single Crystal Composite

Sim

Cho

et al. 2023

Sensors

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Piezoelectric composites, which consist of a piezoelectric material and a polymer, have been extensively studied for the applications of underwater sonar sensors and medical diagnostic ultrasonic transducers. Acoustic sensors utilizing piezoelectric composites can have a high sensitivity and wide bandwidth because of their high piezoelectric coefficient and low acoustic impedance compared to single-phase piezoelectric materials. In this study, a thickness-mode driving hydrophone utilizing a 2-2 piezoelectric single crystal composite was examined. From the theoretical and numerical analysis, material properties that determine the bandwidth and sensitivity of the thickness-mode piezoelectric plate were derived, and the voltage sensitivity of piezoelectric plates with various configurations was compared. It was shown that the 2-2 composite with [011] poled single crystals and epoxy polymers can provide high sensitivity and wide bandwidth when used for hydrophones with a thickness resonance mode. The hydrophone element was designed and fabricated to have a thickness mode at a frequency around 220 kHz by attaching a composite plate of quarter-wavelength thickness to a hard baffle. The fabricated hydrophone demonstrated an open circuit voltage sensitivity of more than −180 dB re 1 V/μPa at the resonance frequency and a −3 dB bandwidth of more than 55 kHz. The theoretical and experimental studies show that the 2-2 single crystal composite can have a high sensitivity and wide bandwidth compared to other configurations of piezoelectric elements when they are used for thickness-mode hydrophones.

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A miniaturized acoustic vector sensor with PIN-PMN-PT single crystal cantilever beam accelerometers

Cited by 8 publications

References 14 publications

The Use of a PVDF Array to Measure the Stress Field Inside an Elastic Material

The Use of a PVDF Array to Measure the Stress Field Inside an Elastic Material

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Theoretical and Experimental Studies on Sensitivity and Bandwidth of Thickness-Mode Driving Hydrophone Utilizing A 2-2 Piezoelectric Single Crystal Composite

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