A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Romijn, Joost; Vollebregt, Sten; Dolleman, Robin J.; Singh, Manvika; Zant, Herre S. J. van der; Steeneken, Peter G.; Sarro, P.M.

doi:10.1109/nems.2018.8556902

Cited by 19 publications

(21 citation statements)

References 10 publications

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“…Some of the issues can be avoided by either growing [ 131 , 132 ] or transferring unsuspended 2D materials directly on the device substrate [ 72 , 133 ] (Figures 1(c) – 1(e) ). It can then be patterned and subsequently the membrane can be released by isotropically underetching (Figures 1(h) and 1(i) ), by using a sacrificial layer [ 134 – 137 ] or by releasing the membranes from the backside ( Figure 1(j) ).…”

Section: Fabrication Methods For Suspended 2d Materials Devicesmentioning

confidence: 99%

“…It has been shown [ 175 ] that the small graphene thickness and cavity depth result in a frequency change as large as 10-90 Hz/Pa, which is a factor of 5-45 higher than that in conventional MEMS squeeze-film sensors despite the smaller area of the device ( Figure 4(k) ). More recently, the feasibility of fabricating squeeze-film pressure sensors using transferless graphene ( Figure 1(d) ) has been demonstrated [ 132 ].…”

Section: 2d Materials Nems Sensorsmentioning

confidence: 99%

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Nanoelectromechanical Sensors Based on Suspended 2D Materials

et al. 2020

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The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

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Section: Fabrication Methods For Suspended 2d Materials Devicesmentioning

confidence: 99%

Section: 2d Materials Nems Sensorsmentioning

confidence: 99%

Nanoelectromechanical Sensors Based on Suspended 2D Materials

et al. 2020

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“…The roughness determined from the spots indicated in figure 1 confirms the homogeneity of the MLG film, the maximum variance of the roughness over the wafer being roughly 23%. The average thickness of about 10 nm [51] could indicate the nature of the material more similar to the ultra-thin graphite. However, the presence of multi-layered structures is confirmed by the Raman spectra, as reported in previous report [46].…”

Section: Positionmentioning

confidence: 99%

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Ricciardella

Vollebregt

Boshuizen

et al. 2020

Mater. Res. Express

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Chemical vapour deposition (CVD) has emerged as the dominant technique to combine high quality with large scale production of graphene. The key challenge for CVD graphene remains the transfer of the film from the growth substrate to the target substrate while preserving the quality of the material. Avoiding the transfer process of single or multi-layered graphene (SLG-MLG) has recently garnered much more interest. Here we report an original method to obtain a 4-inch wafer fully covered by MLG without any transfer step from the growth substrate. We prove that the MLG is completely released on the oxidized silicon wafer. A hydrogen peroxide solution is used to etch the molybdenum layer, used as a catalyst for the MLG growth via CVD. X-ray photoelectron spectroscopy proves that the layer of Mo is etched away and no residues of Mo are trapped beneath MLG. Terahertz transmission near-field imaging as well as Raman spectroscopy and atomic force microscopy show the homogeneity of the MLG film on the entire wafer after the Mo layer etch. These results mark a significant step forward for numerous applications of SLG-MLG on wafer scale, ranging from micro/nano-fabrication to solar cells technology.

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“…As the pressure-induced deflection increases the mechanical stress and tension in the membrane, it can be measured using the piezoresistive effect [13][14][15] and can be probed via the mechanical resonance frequency 2,3,16 . In contrast, graphene squeeze-film pressure sensors 17 and Pirani pressure sensors 18 do not require a hermetic reference cavity and operate at small deflection, which can be beneficial for their operation range.…”

Section: Introductionmentioning

confidence: 99%

Sensitive capacitive pressure sensors based on graphene membrane arrays

Šiškins

Lee

Wehenkel³

et al. 2020

Microsyst Nanoeng

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The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to $$47.8$$ 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.

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A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene

Cited by 19 publications

References 10 publications

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Sensitive capacitive pressure sensors based on graphene membrane arrays

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