A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System

Qiang, 宋强 Song; Jing, 朱菁 Zhu; Jian, 王健 Wang; Fang, 张方 Zhang; Xiangbo, 吕向博 Lü; Baoxi, 杨宝喜 Yang; Huijie, 黄惠杰 Huang

doi:10.3788/aos201535.0122005

Cited by 3 publications

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High diffraction efficiency of three-layer diffractive optics designed for wide temperature range and large incident angle

et al. 2016

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A mathematical model of diffraction efficiency and polychromatic integral diffraction efficiency affected by environment temperature change and incident angle for three-layer diffractive optics with different dispersion materials is put forward, and its effects are analyzed. Taking optical materials N-FK5 and N-SF1 as the substrates of multilayer diffractive optics, the effect on diffraction efficiency and polychromatic integral diffraction efficiency with intermediate materials POLYCARB is analyzed with environment temperature change as well as incident angle. Therefore, three-layer diffractive optics can be applied in more wide environmental temperature ranges and larger incident angles for refractive-diffractive hybrid optical systems, which can obtain better image quality. Analysis results can be used to guide the hybrid imaging optical system design for optical engineers.

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High diffraction efficiency of three-layer diffractive optics designed for wide temperature range and large incident angle

et al. 2016

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Effects on Polychromatic Integral Diffraction Efficiency for Dual-wavebands Harmonic Diffractive Optical Elements

Chang¹,

Yi²

2018

Proceedings of the 2017 4th International Conference on Machinery, Materials and Computer (MACMC 2017)

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Abstract. Harmonic diffractive optical elements(HDOEs) can make multiple-wavebands imaged on the same image plane, which have be widely used in the infrared imaging optical systems. The mathematical model of effects on diffraction efficiency and polychromatic integral diffraction efficiency(PIDE) caused by single point diamond turning processing for dual-wavebands harmonic diffractive optical elements have been set up. And the expressions on diffraction efficiency and PIDE by machining errors including micro-structure heights and widths have been deduced. In order to make the maximum PIDE value over the dual-wavebands, the machining errors should be designed and distributed. Based on the above analysis, the dual-waveband harmonic diffractive optical elements used in 3.7um-4.3um and 8.7um-8.7um wavebands have been analyzed and simulated with MATLAB software on the two conditions including the oblique incidence and general incident distributions for the machining errors, which can be directly used to evaluate broadband hybrid diffractive-reflective optical systems imaging quality. Through the relationship between PIDE and machining errors of dual-wavebands HDOEs, the optical modulation transfer function can be analyzed. The results can be applied to dual band imaging optical systems for controlling the harmonic diffractive optical element processing and machining errors as well as the incident angle design for the hybrid diffractive-reflective optical systems.

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光学系统设计：从迭代优化到人工智能

Gao Jinming,

Guo Jinying,

Dai Anli

et al. 2023

中国激光

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A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System

Cited by 3 publications

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High diffraction efficiency of three-layer diffractive optics designed for wide temperature range and large incident angle

High diffraction efficiency of three-layer diffractive optics designed for wide temperature range and large incident angle

Effects on Polychromatic Integral Diffraction Efficiency for Dual-wavebands Harmonic Diffractive Optical Elements

光学系统设计：从迭代优化到人工智能

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