A Model-Based Approach for Measuring Wavefront Aberrations Using Random Ball Residual Compensation

Abstract

The projection objective lens holds a pivotal role in lithography, directly influencing imaging system quality and, consequently, the lithography machine’s feature dimensions. Optical inspection methods for this lens require advancements in calibrating systematic error and enhancing alignment precision of auxiliary devices, given their impact on calibration accuracy. In the random averaging method, random ball can give rise to additional wavefront aberrations due to misalignment and numerical aperture mismatch. To mitigate these aberrations and enhance the accuracy of systematic error calibration, this paper introduces a random ball residual compensation (RBRC) model. Additionally, when combined with the random averaging technique, it elevates the calibration accuracy of the measured lens’s wavefront aberrations. The experimental results underscore the method’s effectiveness, accurately determining optical component eccentricities and numerical aperture errors. After eliminating these errors, more accurate values of lens wavefront aberrations are achieved. This research significantly contributes to enhancing error calibration of lithography objective lens systems.