A model for prediction of subsurface damage in rotary ultrasonic face milling of optical K9 glass

Abstract

Subsurface damage (SSD) induced by the rotary ultrasonic face machining (RUFM) considerably influences the technological application of the optical components. However, currently, there is no method to detect the depth of SSD in real time. For the purpose of precise and nondestructive evaluation of the SSD depth generated in RUFM processes, a predictive model was developed by applying the indentation fracture mechanics of brittle material. This was the first time that the correlation between the measured cutting force and SSD depth had been established. It was found that the SSD depth was directly proportional to the exponent of the measured cutting force (namely d SSD =γF c χ ). Using this model, the depth of SSD could be predicted rapidly and precisely in the RUFM of optical glass even in real time using the measuring cutting force. Subsequently, this method was verified by conducting RUFM tests on K9 glass specimens with Sauer Ultrasonic 50. Meanwhile, the cutting force and SSD depth were compared experimentally between RUFM and conventional grinding (CG) process, indicating that RUFM is a beneficial manufacturing method for optical glass with reduced cutting force and SSD depth.

Methods for Detection of Subsurface Damage: A Review

“…Wang et al [7] correlated SSD depth with cutting force in the rotary ultrasonic face milling of a K9 glass. They found that SSD depth was proportional to the exponent of cutting force, i.e., δ=γ F χ c .…”

“…Hard and brittle materials are widely used because of their excellent physical and mechanical properties, such as high hardness and strength at elevated temperatures, wear and corrosion resistances, etc. Among hard and brittle materials, single crystalline silicon is the predominant substrate material for integrated circuits (IC) [1][2][3][4][5]; optical glasses are for optical windows and lens [6][7][8][9][10][11] as well as high-power laser components [12]; ceramic materials are commonly used for bearings, cutting tools and machine parts [13][14][15][16]. However, these materials are also difficult to machine due to their hard and brittle nature.…”

Mechanism of Crack Propagation for K9 Glass

“…Besides, they also developed a prediction model for SSD in grinding K9 glass by theoretical derivation and the validity is verified by their grinding experiment [5]. Wang et al [6] researched the influence of ultrasonic assisted machining for K9 glass and proposed a model to predict SSD of K9 glass in rotary ultrasonic face milling. Guo et al [7] established a cutting model of K9 glass by using smoothed particle hydrodynamics method and found the critical cutting depth varied with different tool shape and speed.…”

Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics

“…Li et al developed a mathematical model based on the Lambropoulos model to calculate SSD depth, which can also rapidly and accurately predict surface roughness [21]. Zhang et al established an SSD prediction model considering grinding parameters and spindle dynamics [22]. Esmaeilzare et al proposed a prediction model to investigate the influences of different process parameters on the surface roughness and SSD depth of Zerodur® ceramics based on statistical analysis [23].…”