A modeling and vibration analysis of a piezoelectric micro-pump diaphragm

Kaviani, Samira; Bahrami, Mohsen; Esfahani, Amir Monemian; Parsi, Behzad

doi:10.1016/j.crme.2014.06.005

Cited by 18 publications

(11 citation statements)

References 11 publications

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“…where Punit is the power of the unit thermal resistor. The estimation above would help a designer to evaluate the number of the required thermal resistors and the corresponding required power without invoking any expensive FEM simulations [24]. Autonomously controlling inner temperature of the enclosure is of importance in this research since in the remote area the enclosures have to detect the ambient temperature and automatically tune their thermal units.…”

Section: Analytic Modeling and Fuzzy Logic Controllermentioning

confidence: 99%

Design and optimization of cost-effective coldproof portable enclosures for polar environment

Parsi

Zhang

2020

IJECE

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Based on the International Electrotechnical Commission standards, the electronic devices in the industrial class (e.g., integrated circuits or batteries) can only operate at the ambient temperature between -40°C and 85°C. For the human-involved regions in Alaska, Northern Canada, and Antarctica, extreme cold condition as low as -55°C might affect sensing electronic devices utilized in the scientific or industrial applications. In this paper, we propose a design and optimization methodology for the self-heating portable enclosures, which can warm up the inner space from -55°C for encasing the low-cost industrial-class electronic devices instead of expensive military-class ones to work reliably within their allowed operating temperature limit. Among the other options, ceramic thermal resistors are selected as the heating elements inside the enclosure. The placement of the thermal resistors is studied with the aid of thermal modelling for the single heating device by using the curve fitting technique to achieve uniform temperature distribution within the enclosure. To maintain the inner temperature above -40°C but with the least power consumption from the thermal resistors, we have developed a control system based on the fuzzy logic controller. For validation, we have utilized COMSOL Multiphysics software and then one prototyped enclosure along with the fuzzy control system. Our experimental measurement exhibits its efficacy compared to the other design options.

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Section: Analytic Modeling and Fuzzy Logic Controllermentioning

confidence: 99%

Design and optimization of cost-effective coldproof portable enclosures for polar environment

Parsi

Zhang

2020

IJECE

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“…The volume integration of each layer is expressed as (15) where h is the distance from the neutral plane to the bottom of the passive layer, and can be obtained based on the moment balance, (16) Li and Chen [6] has approximately computed the neutral plane for the unimorph piezoactuator as (17) The electric potential (φ) of the piezoelectric layer is usually supposed evenly distributed, thus the electric field strength (Ez) is calculated as (18) Substituting Eqs. (10), (11) and (14) into (6) results in (19) According to the variational principle, the functional derivative of X(t) is equal to zero, therefore governing equation concerning the vibrational piezoactuator is obtained. In order to prevent infinite deflections when the actuator is excited at its resonant frequency, the governing equation needs to account for the damping effect.…”

Section: Theory Of Vibrationmentioning

confidence: 99%

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Liang

Wang

2017

Sensors and Actuators A: Physical

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A theoretical solution is formulated to analyze the vibration behaviors of circular diaphragm-type piezoactuators based on the Hamilton's principle and Rayleigh-Ritz method, which are particular suitable for modeling the deflection of multilayer structures. Each of the actuator three layers is considered as an individual layer in the modeling. The energy associated with the solution includes the kinetic energy of the actuator, the elastic potential energy of the various layers, the electric potential energy in the piezodisc, and the work done by the force of electric filed. The transverse displacement is separated into a time dependence term and a mode shape term, then the vibrational governing equation is derived using the functional variation, and is approximately solved through the method of multiple scales. Moreover, added mass loads are introduced to the diaphragm center for the sake of decreasing the resonant frequency, where many MEMS devices, such as gas micropumps and ejectors, have a higher working efficiency. The proposed analytical solution is validated numerically via the finite element method (FEM) and experimentally via measurements; the theoretical results are found to be in good agreement with the FEM results as well as with the experimental results. Furthermore, the effects of mass loads, geometric dimensions and material properties of the piezoactuator on the resonant frequency are discussed.

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“…For this purpose, Olfatnia et al (2010) investigated the vibrational modes and frequencies of circular piezoelectric microdiaphragms. Vibration analysis of a circular micropump diaphragm was analysed analytically and experimentally by Kaviani et al (2014), Monemian Esfahani and Bahrami (2016), Monemian Esfahani et al (2018) and He et al (2017). Hu et al (2017) theoretically, numerically and experimentally studied the vibration parameters of circular type piezo-actuators with mass.…”

Section: Introductionmentioning

confidence: 99%

Displacement Analysis of a Piezoelectric Based Multi-layered Micropump Diaphragm

Dereshgi

Yıldız

Dal

2020

Iran J Sci Technol Trans Mech Eng

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This paper presents the diaphragm displacement analysis of multi-layered circular piezoelectric actuator (MCPA) using analytical, numerical and experimental methods. The piezoelectric zirconate titanate (PZT) actuator model examined in this study consists of a structure with 3 different diameters and 7 layers. The multi-layered and multi-covered actuator model was composed of three main layers in different radii and thickness with silicon, brass and the PZT and four additional layers with silver and bonding. When creating an analytical model, the effects of all layers were taken into account on the static deflection performance of the actuator. The classical laminated plate theory based on Kirchhoff thin plate theory was used in the analytic modelling studies of the actuator. The mathematical model, which is the solution of the static displacement equation of the non-homogenous for the MCPA of the micropump, depends on the applied voltage and pressure load together with the material and physical properties. The electric-solid coupling of the piezoelectric actuator and the silicon diaphragm layer under the effect of applied voltage load, and the silicon-fluid coupling under the uniform fluid pressure were simulated by numerical modelling with finite elements. In addition, the maximum displacements of the MCPA with silicon exposed to uniform flow pressure and electric voltage load were measured at different frequencies experimentally. It was observed that the results obtained from the analytical model, finite element analysis and experimental studies were sufficiently compatible with each other. Using the verified analytical model, the effects of layer thicknesses, layer diameters and adhesive layer on actuator static displacement performance are discussed.

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A modeling and vibration analysis of a piezoelectric micro-pump diaphragm

Cited by 18 publications

References 11 publications

Design and optimization of cost-effective coldproof portable enclosures for polar environment

Design and optimization of cost-effective coldproof portable enclosures for polar environment

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Displacement Analysis of a Piezoelectric Based Multi-layered Micropump Diaphragm

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