A monoenergetic electron source generated by nuclear stimulated desorption

Abstract

A series of measurements of nuclear stimulated desorption was performed for 103Ru, using thin ruthenium films irradiated by thermal neutrons. The magnitude, time dependence and electric charge state of the outgoing 103Rh flux was investigated. The utilization of monoenergetic electrons accompanying the 103Rh decay for thin film thickness measurement is considered.

The applicability of implanted -sources to thickness and stoichiometry measurements of thin films

“…The amount of energy lost depends on the identity of the charged particle, on its initial energy, on the identity of the medium and on the length of the trajectory traversed through it. In order for this phenomenon to be useful as a means for measuring the (average) thickness of a thin film, the initial and final energy spectra of the charged particle must be sufficiently well defined [5]. For a mono-energetic particle, the initial energy spectrum usually consists of a sharp, well-defined peak.…”

Recoil implantation of alpha sources for thickness measurement of thin films

“…Therefore, one can obtain the average thickness of a layer of known composition by measuring the amount of energy the particles lose in passing through it. For this to be practical and accurate, the initial energy of the particles must be well defined [4]. A possible source of such monoenergetic particles is a radioactive isotope undergoing a-decay, embedded in the substrate.…”