A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator

Tallur, Siddharth; Sridaran, Suresh; Bhave, Sunil A.

doi:10.1364/oe.19.024522

Cited by 60 publications

(52 citation statements)

References 15 publications

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“…The optical resonance shape is Lorentzian (see Figure 3 (b)), and therefore the modulation is non-linear. This results in generation of multiple harmonics of the fundamental oscillation frequency, as observed earlier in opto-mechanical oscillators which function based on the same modulation scheme [19], [20]. Figure 7 (a) shows measured harmonics all the way up to 16.4GHz.…”

Section: Opto-acoustic Oscillator (Oao)supporting

confidence: 61%

Partial Gap Transduced MEMS Optoacoustic Oscillator Beyond Gigahertz

Tallur

Bhave

2015

J. Microelectromech. Syst.

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Electrostatically actuated microelectromechanical system (MEMS) oscillators are limited to few megahertzgigahertz range on account of transduction inefficiency at higher frequencies. Piezoelectric transduction affords lower motional impedances at high frequencies, however mass-loading on account of metal electrodes imposes practical limits on the mechanical quality factor of piezoelectric resonators in the gigahertz frequency regime. In this paper, we present a silicon optoacoustic oscillator operating at 2.05 GHz with signal power 18 dBm and phase noise −80 dBc/Hz at 10-kHz offset from carrier. We employ displacement amplification and partial air gap capacitive transduction to enhance the transduction efficiency. An unconventional photolithography step is performed on a released MEMS structure, which greatly simplifies the fabrication process and allows electrical contact with the electrodes. Builtin nonlinear optomechanical modulation provides noiseless upconversion of the oscillation signal all the way up to 16.4 GHz with −45-dBm signal power. We develop a phase noise model for the oscillator and identify the photodetector shot noise to be the dominant noise source. Using a high gain and low noise avalanche photodetector enables reduction of the far-from-carrier phase noise floor by 15dB. The phase noise model provides insights into understanding the influence of laser detuning on the oscillator noise performance, which has not been studied to date.[ 2013-0291]Index Terms-Opto-acoustic oscillator, phase noise, displacement amplifier, atomic layer deposition (ALD).

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Section: Opto-acoustic Oscillator (Oao)supporting

confidence: 61%

Partial Gap Transduced MEMS Optoacoustic Oscillator Beyond Gigahertz

Tallur

Bhave

2015

J. Microelectromech. Syst.

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“…Similarly, laterally-coupled photonic crystal nanobeam cavities in Si 3 N 4 have been demonstrated, where the optical mode supported by these beams is coupled to the antisymmetric in-plane mechanical motion of the beams [5], [48]. Optomechanical oscillators based on Si 3 N 4 whispering-gallery-mode resonators and operating at ≈50 MHz mechanical resonant frequencies have also recently been demonstrated [49], [50].…”

Section: A Relationship To Other Si 3 N 4 Cavity Optomechanical Systemsmentioning

confidence: 98%

Si<inline-formula><tex-math>$_{\bf 3}$</tex-math></inline-formula>N<inline-formula> <tex-math>$_{\bf 4}$</tex-math></inline-formula> Nanobeam Optomechanical Crystals

Grutter

Davanço

Srinivasan

2015

IEEE J. Select. Topics Quantum Electron.

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The development of Si 3 N 4 nanobeam optomechanical crystals is reviewed. These structures consist of a 350-nm thick, 700-nm wide doubly-clamped Si 3 N 4 nanobeam that is periodically patterned with an array of air holes to which a defect region is introduced. The periodic patterning simultaneously creates a photonic bandgap for 980 nm band photons and a phononic bandgap for 4 GHz phonons, with the defect region serving to colocalize optical and mechanical modes within their respective bandgaps. These optical and mechanical modes interact dispersively with a coupling rate g 0 /2π ≈ 100 kHz, which describes the shift in cavity mode optical frequency due to the zero-point motion of the mechanical mode. Optical sidebands generated by interaction with the mechanical mode lie outside of the optical cavity linewidth, enabling possible use of this system in applications requiring sideband-resolved operation. Along with a review of the basic device design, fabrication, and measurement procedures, we present new results on improved optical quality factors (up to 4 × 10 5 ) through optimized lithography, measurements of devices after HF acid surface treatment, and temperature dependent measurements of mechanical damping between 6 and 300 K. A frequency-mechanical quality factor product (f × Q m ) as high as ≈ 2.6 × 10 13 Hz is measured.

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“…At a high input power and blue cavity detuning, the optomechanical back-action can overcome the mechanical damping and cause the sustained mechanical self-oscillation. 12 As shown in the inset of Fig. 3(a), above a threshold optical power of þ15 dBm (before the input coupler), the ring resonator oscillates in the fundamental radial-breathing mode at 47.3 MHz, indicated by a series of harmonics of the fundamental mode recorded by the spectrum analyzer.…”

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confidence: 94%

Integrated high frequency aluminum nitride optomechanical resonators

Xiong

Sun

Fong

et al. 2012

Applied Physics Letters

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Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.2\times10^(-18)m/Hz^(1/2) in ambient air

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A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator

Cited by 60 publications

References 15 publications

Partial Gap Transduced MEMS Optoacoustic Oscillator Beyond Gigahertz

Partial Gap Transduced MEMS Optoacoustic Oscillator Beyond Gigahertz

Si<inline-formula><tex-math>$_{\bf 3}$</tex-math></inline-formula>N<inline-formula> <tex-math>$_{\bf 4}$</tex-math></inline-formula> Nanobeam Optomechanical Crystals

Integrated high frequency aluminum nitride optomechanical resonators

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