A multi-chip directly mounted 512-MEMS-mirror array module with a hermetically sealed package for large optical cross-connects

Mi, Xiaoyu; Soneda, H.; Okuda, H.; Tsuboi, Osamu; Kouma, N.; Mizuno, Yoshihiro; Ueda, Shigenori; Sawaki, I.

doi:10.1088/1464-4258/8/7/s08

Cited by 10 publications

(7 citation statements)

References 10 publications

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“…To attain high-speed switching in OBS, we developed a comb-driven MEMS mirror, using multi-step deep reactive ion etching (D-RIE) on both sides of a silicon-on-insulator (SOI) wafer, as shown in Figure 2 [4][5][6]. As comb-teeth actuators have large electro-static forces, the switching speed of a comb-driven MEMS mirror is over 10 times faster than that of a conventional parallel plate mirrors.…”

Section: -D-mems Swmentioning

confidence: 99%

“…We also developed a unique high-speed technique to control the MEMS mirror in order to eliminate its mechanical resonance using a digital notch filter and a non-linear torque compensator ( Figure 3) [7]. Using a folded optical switch fabric configuration with a roof-type retro-reflector [8][9] and multi-chip mounting to enlarge the MEMS mirror array [6], we developed a 256x256-channel SW. Figure 4 shows 256x256-channel optical switch fabric. Our design enabled us to achieve optical stability and low insertion loss (5 dB).…”

Section: -D-mems Swmentioning

confidence: 99%

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Optical switching technologies for optical routing

et al. 2006

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Section: -D-mems Swmentioning

confidence: 99%

Section: -D-mems Swmentioning

confidence: 99%

Optical switching technologies for optical routing

et al. 2006

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“…Currently, optical switch fabrics in which the reconfiguration overhead is within the nanoseconds or picoseconds range are only available on a small scale, such as 2 × 2 [16,22] and 4 × 4 [24]. Most large-scale optical switch fabrics exploit technologies that are associated with a reconfiguration overhead within the milliseconds range, such as microelectromechanical systems (MEMS) [9,13,17,19,20,29]. Therefore, the reconfiguration overhead is an important issue in relation to the packet transmission time and throughput.…”

Section: Introductionmentioning

confidence: 99%

An analytical model for input-buffered optical packet switches with reconfiguration overhead

Chou

Lin

2011

Photon Netw Commun

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The overhead associated with reconfiguring a switch fabric in optical packet switches is an important issue in relation to the packet transmission time and can adversely affect switch performance. The reconfiguration overhead increases the mean waiting time of packets and reduces throughput. The scheduling of packets must take into account the reconfiguration frequency. This work proposes an analytical model for input-buffered optical packet switches with the reconfiguration overhead and analytically finds the optimal reconfiguration frequency that minimizes the mean waiting time of packets. The analytical model is suitable for several round-robin (RR) scheduling schemes in which only non-empty virtual output queues (VOQs) are served or all VOQs are served and is used to examine the effects of the RR scheduling schemes and various network parameters on the mean waiting time of packets. Quantitative examples demonstrate that properly balancing the reconfiguration frequency can effectively reduce the mean waiting time of packets

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“…A similar wide range of applications is addressed by the Grating Light valve of Silicon Light Machines, like e. g. imaging [3] and computer to plate printing (CTP) [4]. Samsung presented a programmable grating for display applications based on piezoelectric actuation [5] and e. g. Fujitsu developed a micro mirror array for large optical cross connects [6]. Various micro mirror arrays and deformable mirrors for adaptive optics were presented in the past like e. g. that of Boston Micromachines [7].…”

Section: Introductionmentioning

confidence: 99%

The high versatility of silicon based micro-optical modulators

Schenk

2009

SPIE Proceedings

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"One product, one process": This MEMS law is true for micro-optical modulators, too and thus puts a high load on every product and technology development team. On the other hand the law expresses nothing but the high versatility of the underlying usually silicon based technology. A huge variety of applications where an electromagnetic wave experiences a spatial-temporal modulation makes use of this technology: High resolution as well as ultra-compact displays, optical switches in telecommunication as well as data storage devices, spectrometers e. g. for quality control, as well as adaptive optics and pattern generation to mention only a few. The applications completely differ with regard to the requirements in almost all aspects. The most important drivers to use silicon based micro-optical modulators are high accuracy, high bandwidth and high miniaturization. A continuous further development of the technology can be reported. Novel optical, mechanical and electrical working principles are investigated to meet future requirements. After a short overview of the most typical applications of silicon based micro-optical modulators the high versatility of this technology is detailed by means of selected devices and applications. Single 1D and 2D micro mirrors with diameters of up to 4 mm e. g. for projection, imaging and spectroscopy are as well presented and discussed as micro mirror arrays comprising up to 1 million analog deflectable mirrors for image generation and phase modulation in microlithography and adaptive optics

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A multi-chip directly mounted 512-MEMS-mirror array module with a hermetically sealed package for large optical cross-connects

Cited by 10 publications

References 10 publications

Optical switching technologies for optical routing

Optical switching technologies for optical routing

An analytical model for input-buffered optical packet switches with reconfiguration overhead

The high versatility of silicon based micro-optical modulators

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