A multi-method study of femtosecond laser modification and ablation of amorphous hydrogenated carbon coatings
Kenta Hirahara,
Jörn Bonse,
Jörg Krüger
et al.
Abstract:We present a study on femtosecond laser treatment of amorphous hydrogen-containing carbon coatings (a-C:H). The coatings were deposited on silicon wafers by a plasma-assisted chemical vapour deposition (PA-CVD), resulting in two different types of material with distinct properties (referred to as “absorbing” and “semi-transparent” coatings in the following). The samples were laser-treated with single fs-laser pulses (800 nm center wavelength, 35 fs pulse duration) in the ablative regime. Through a multi-method… Show more
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