A multi-model design for robust hybrid control of non-linear piezoelectric actuators at the micro/nano scales

Cailliez, Jonathan; Liang, Shuang; Régnier, Stéphane

doi:10.23919/acc.2018.8431685

Cited by 2 publications

(1 citation statement)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This method has, nevertheless, not been designed to deal with hybrid control issues. Therefore, the first contribution of this article is the generalization of the method in the case of hybrid control as described in Section V. This generalization has been first presented in the conference [32], and it is generalized here, where switch conditions are not only defined by position measurement of a piezoelectric inertia actuator but also by data from a tuning fork-probe of the AFM. The application of this method for robust AFM tip landing and the characterization of interaction force regions are the second contribution of this article.…”

Section: Hybrid Control Issuementioning

confidence: 99%

Robust Hybrid Control of an Atomic Force Microscope for the Characterization of Interaction Force Regions at the Nanoscale

Cailliez

Liang

Régnier

2021

IEEE Trans. Contr. Syst. Technol.

Self Cite

View full text Add to dashboard Cite

This article deals with a novel hybrid control of an atomic force microscope (AFM) for the robust characterization of interaction tip/sample force regions. The hybrid structure is composed of several position and force controllers and a specific switch compensation structure. A single selected controller is online at a time, and a robust bumpless switch between different control laws is designed. The objectives are the robustness of each controller and switch compensator with respect to uncertain parameters of the AFM. The method uses discrete points in the range of uncertainties. For each operating point, the hybrid controller is designed by an eigenstructure assignment. The method is generalized by a multimodel approach considering only uncertainties defined by a worst-case analysis, thus reducing the conservatism. The order of the controller is related to the number of observers selected by the user. This offers the possibility to design a low-order controller depending on the control specifications. The experimental results demonstrate the effectiveness of the hybrid controller for a fully automated landing procedure of the AFM tip on a sample surface and for force distance curve cycle characterization. Thanks to the robustness of the control method, landing and cycles are reproducible despite actuator uncertainties, friction variation due to aging, and instrumental issues such as the real-time data acquisition.

show abstract

Section: Hybrid Control Issuementioning

confidence: 99%