A Multilayer-Based High-Performance Multisubpart Profile Grating Reflector

Abstract

Abstract-In this letter, a multilayer-based high-performance subwavelength multisubpart profile grating reflector (MPGR) is proposed and fabricated. The properties of the reflector are investigated by rigorous coupled-wave analysis for multilayered grating structures. It is shown that with the properly configured profile and strongly modulated grating layer in transverse-electric polarized wave, the MPGR experimentally demonstrates a broadband reflection spectrum from 1.56 to 1.8 m, very high reflectivity ( 97%), and good angular insensitivity of about 27.8 .

Development trends in silicon photonics

“…Zhou's group proposed a coupler based on binary blazed grating (BBG) which had a high coupling efficiency of 65% for transverse electric (TE) mode [35] . A broadband polarization insensitive reflector was realized both theoretically and experimentally with up to 96% reflectivity over a wavelength rang of 1.2∼1.7 µm [36,37] . A special narrow filer with tunable wavelength and one with tunable bandwidth were also designed [38,39] .…”

Leaky Bloch modal evolution of wideband reflectors with zero-contrast gratings from symmetric trapez to triangle ridge shapes

“…Because of the wide flat band possible with fractional bandwidth, Δλ∕λ center up to ∼40%, 12 and ease of fabrication using mature lithography and dry etching technologies, the grating groove in these structures is mainly rectangular with the same duty cycle from the top to the bottom of the groove. [11][12][13][14][15][16][17] In recent years, the impact of tapered sidewall profiles on the performance of GMR gratings has been studied, showing that this tapering will reduce the bandwidth and reflectivity for both ZCG and HCG. 18,19 These gratings with tapered profiles have a gap between adjacent slots, which is different from the trapezoidal structures proposed here.…”