Advanced materials could perform functions in response to external stimuli. These are responsive materials. In order for us to develop advanced functional systems with a good responsive nature, we need to create a methodology that goes one step further. It is the artificial architecture of functional material systems based on the knowledge of nanotechnology. The task will be fulfilled by the new concept of nanoarchitectonics. Nanoarchitectonics integrates nanotechnology with various material sciences, basic chemistry, microfabrication techniques, and biological processes to architect functional material systems from atomic, molecular, and nanomaterial units. This review will deal with the nanoarchitectonics of responsive materials related with phenomena at interfaces. In order to demonstrate the effectiveness of responsive materials nanoarchitectonics at interfaces for functional systems of various sizes, this review article is organized by size for various functional systems. Specifically, this review has grouped them into (i) molecular level response, (ii) nanodevice level response, (iii) material level response, and (iv) living cell level response. If the social demand for these materials is fully recognized, such development is expected to efficiently progress. This review article would play a role in stimulating such development.