2021
DOI: 10.1021/acsanm.1c02054
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A Nanocolumnar Tantalum Oxide-Guided Mode Resonance Sensor for Volatile Organic Compounds

Abstract: In this work, a nanocolumnar tantalum oxide waveguide is introduced in a guided-mode resonance-based sensor for volatile organic compound detection. The presence of a nanocolumnar structure where optical resonance is localized allows for molecular diffusion and adsorption and hence the enhancement of the sensor’s sensitivity. Here, the nanocolumnar tantalum oxide film is fabricated using a pulsed direct current reactive magnetron sputtering system at low kinetic energy deposition. By optimizing the operation p… Show more

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Cited by 5 publications
(2 citation statements)
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“…For this purpose, various sensing materials (metal oxide, 2D material, conductive polymer, and carbon, etc.) have been intensively explored to distinguish the signal for the specific VOC 25 , 26 . It is worth noting here that increasing the number of sensor arrays can contribute to more complex signal recognition and therefore improve accuracy in data interpretation.…”
Section: Introductionmentioning
confidence: 99%
“…For this purpose, various sensing materials (metal oxide, 2D material, conductive polymer, and carbon, etc.) have been intensively explored to distinguish the signal for the specific VOC 25 , 26 . It is worth noting here that increasing the number of sensor arrays can contribute to more complex signal recognition and therefore improve accuracy in data interpretation.…”
Section: Introductionmentioning
confidence: 99%
“…而物质 的介电常数ε的虚部与导电率σ有关, 即 ) -1 . 将传 感器的性能与基于波导共振模式气体传感器 [41] 进行 对比(见补充材料表S3), 本工作无论是在半峰宽、灵 敏度还是FOM值上都更加优异.…”
Section: 研究以往已经报道的基于Spr折射率的气体传感 器的工作 我们发现unclassified