Thermal noise arising from mechanical dissipation in oxide coatings is a major limitation to many precision measurement systems, including optical frequency standards, high-resolution optical spectroscopy and interferometric gravity wave detectors. Presented here are measurements of dissipation as a function of temperature between 7 K and 290 K in ion-beam-sputtered Ta 2 O 5 doped with TiO 2 , showing a loss peak at 20 K. Analysis of the peak provides the first evidence of the source of dissipation in doped Ta 2 O 5 coatings, leading to possibilities for the reduction of thermal noise effects.