A new approach for setting up and applying a fiber-based Fabry–Perot interferometer

Konle, H. J.; Spitalny, Mirko; Paschereit, Christian Oliver; Bake, Friedrich; Röhle, I.

doi:10.1088/0957-0233/21/7/075305

Cited by 1 publication

(1 citation statement)

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“…Hou et al proposed a novel micro-optoelectro-mechanical systems (MOEMS) accelerometer and realized a resonant frequency of 300 Hz with a resolution of 80 ng Hz −1/2 [7]. Others utilized various interferometry configurations to generate an induced phase shift for acceleration sensing [8][9][10][11]. The relationship between the induced phase shift and the acceleration represents one of the major figure of merits of FOAs, which is known as responsivity, ϕ/a, and is often expressed as 20 log 10 [ ϕ/(a/g)].…”

Section: Introductionmentioning

confidence: 99%

A high-resolution fiber optic accelerometer based on intracavity phase-generated carrier (PGC) modulation

Lin

Chen

et al. 2010

Meas. Sci. Technol.

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A compact-size fiber optic accelerometer was designed to achieve both high resolution and wide dynamic range concurrently. An optical cavity, with its length modulated by a piezoelectric oscillator at audio frequency, is utilized to resolve the nanometer-level displacement of a silicon micro-mirror which serves as an inertial mass for acceleration sensing. Strain analysis of the proof-mass flexure structure by Cosmosworks was carried out to calculate responsivity and resonance frequency for a comparison with experimental measurement. The responsivity below the structural resonance frequency of 160 Hz reaches 36 dB re 1 rad/g. Performance measurement demonstrated that the accelerometer was able to resolve an acceleration of 48 ng Hz−1/2 with a dynamic range of 2 × 107.

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