“…In order to solve Equation of net current density, necessary expressions of secondary and backscattered current density are presented below. - Secondary electron current density due to electrons ( j se ) is represented as,
where Y se and E are electron‐induced SEY and incident electron energy, respectively, and f(E) is Maxwellian space plasma velocity distribution of ambient electrons given by, where T e , n e , m e , and v e are electron temperature, density, mass, and velocity, respectively.…”