A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles

Lee, Yung-Chun; Chen, Chun Ming; Wu, Chun Ying

doi:10.1016/j.sna.2004.06.006

Cited by 39 publications

(29 citation statements)

References 11 publications

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“…Another method is known as contour mask scanning (Zimmer et al 2000), in which contour or mask opening is synchronized with sample movement to achieve depth variation. Lee et al (2005) have successfully fabricated axis symmetric micro lenses using a new approach termed as "planetary mask contour scanning method". In this method the mask revolves as well as rotates at the same time.…”

Section: Fabrication Of Micro Lens Arraymentioning

confidence: 99%

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Akhtar

Sharma

Ramkumar

2015

Lasers Based Manufacturing

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Micro Lens arrays are widely used in optical devices such as photo-sensors, digital projectors, photovoltaic cells, 3D imaging etc. These have traditionally been fabricated by photolithography, moulding and embossing, reactive ion etching and electroforming. These processes are wet processes and require expensive setup and running cost. A novel method is presented in this work that allows fabrication of micro lens array using excimer laser micromachining. The fabrication has been done using mask projection with work piece scanning. A KrF excimer laser has been used to micro machine lenses on a poly (methyl methacrylate) substrate. The surface profile of the lens array is measured and then related to the laser-material coupling and the energy of the laser pulses. Using this method, it is possible to fabricate micro lenses down to a diameter of 5 µm over a considerably large area.

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Section: Fabrication Of Micro Lens Arraymentioning

confidence: 99%

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Akhtar

Sharma

Ramkumar

2015

Lasers Based Manufacturing

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“…The micro-patterning such as micro-pyramid array, aspheric microlenses, and microlens array have been manufactured by laser micromachining with various dragging methods [19][20][21][22][23][24]. Figure 7.4 depicts the microlens is produced on PC material by dragging the polymer surface along multiple circular paths with the excimer laser [21,22].…”

Section: Model Construction Of Laser Draggingmentioning

confidence: 99%

“…Furthermore, the convex and concave microlenses are fabricated on PC material by the circular dragging method with designed mask pattern as shown in Fig. 7.7 [24].…”

Section: Model Construction Of Laser Draggingmentioning

confidence: 99%

Micromachining by Photonic Beams

Tsai

Hocheng

Wang

et al. 2012

Advanced Analysis of Nontraditional Machining

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We analyze a laser dragging process capable of ablating a groove pattern, and producing sophisticated 3D features, on a polycarbonate (PC) sheet through a shaped mask opening. To predict the machined profile during the dragging process, we developed a mathematical model that describes the relationship between laser machining parameters and the produced profile. In addition, we manufacture a miniature lamp lens by varying the mask shape, and dimensions based on the proposed model. The effects of the micro-size lamp lens on light efficiency are investigated. On the other hand, this chapter also introduces a study of sub-micron-structure machining on silicon substrates by a direct writing system using a femtosecond laser with the central wavelength of 800 nm, pulse duration of 120 fs and repetition rate of 1 kHz. Three types of experiment are studied: (1) The effect of photoresist on silicon, (2) The machinability of different orientations of silicon: spike morphologies were observed on all three orientations of silicon substrates without obvious directional difference of these spikes on the different silicon substrates, (3) Micro-structure size and cross-section shape: a numerical model of the machining parameters has been proposed to simulate the cross-section of the micro-structure resulting from a given ablation energy. The predicted shape, determined by simulation, fitted the profile of the cross-section shape well.

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“…The energy density of nanosecond laser is very high (~1J), and recently it has been used to fabricate microstructures directly on the surface of materials such as metals, semiconductors, ceramics [8], etc. Also, the nanosecond laser can fabricated micro-gratings on the surface of the specimen without mask, which provides an alternative way of grating fabrication and its corresponding research is of significant importance.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Micro-grating Structure by Nanosecond Laser

Huang¹,

Zhu

2015

Optics

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Abstract:The fabrication method by nanosecond laser technology for micro-grating is investigated in this paper. A nanosecond laser system is established and the mechanism of laser processing on material surface is theoretically analyzed. The damage threshold of stainless steel is obtained experimentally when the nanosecond laser irradiates on the specimen's surface and the influence of the laser pulse energy to the fabricated micro-gratings are also studied. In the end, micro-gratings with high-quality are provided to validate the feasibility of the fabrication method by nanosecond laser technology.

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A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles

Cited by 39 publications

References 11 publications

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Micromachining by Photonic Beams

Fabrication of Micro-grating Structure by Nanosecond Laser

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