A new generation of CMOS-compatible high frequency micro-inductors with ferromagnetic cores: Theory, fabrication and characterisation

Hyperfine interaction studies and magnetic properties of FeCoAlN nanocomposite films

“…area of high-frequency CMOS electronics and CMOS-compatible micro-inductors [1]. Therefore, their magnetic properties and the value of effective permeability at high frequencies play the key role for their practical applications.…”

Influence of grain growth on the high-frequency behaviour of ferromagnetic Fe–Co–(M)–N (M=Ta, Hf) nanocomposite films

“…Research on soft ferromagnetic films for high-frequency electronic applications have been mainly driven by the demand on novel micro-inductors [1][2][3], filters as well as electromagnetic noise absorber concepts [4,5]. Latest concepts of conditioning ferromagnetic films have been realised to make them suitable for high-frequency performance [6][7][8].…”

Damping and ferromagnetic resonance linewidth broadening in nanocrystalline soft ferromagnetic Fe–Co–Hf–N films

“…In case of using CMOS compatible soft ferromagnetic films with suitable high-frequency features for microelectronic components like microinductors [1,2], which becomes more and more important for high-performance passive devices, losses in their frequency behaviour due to dissipation play a non-neglecting and essential role for their optimisation. Beside eddy-currents, one of the main loss mechanisms is the dissipation of electromagnetic wave energy via twomagnon scattering [3][4][5] into the lattice or by various local ferromagnetic resonance frequencies.…”