A New Generation of Micromachined Accelerometers For Airbag Applications

Aikele, M.; Rose, M. J.; Gottinger, R.; Prechtel, U.; Schalk, J.; Ohgke, T.; Weinacht, M.; Seidel, Helmut

doi:10.1007/978-3-662-03838-3_21

Cited by 4 publications

(3 citation statements)

References 2 publications

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“…For any given total length of a single sensing element, l tot = l b + l m , an optimum ratio between the mass length, l m , and the beam length, l b , that maximizes the sensitivity can be obtained by finding the maximum sensitivity of equation (7). This is obtained when…”

Section: Prototype Designmentioning

confidence: 99%

“…A few three-axis accelerometer designs based on four identical sensing elements have been proposed and investigated during the last few years [6][7][8] but not yet well modelled and characterized regarding dynamic properties and cross-axis sensitivity. The aim of this work is to present models for better understanding and prediction of the behaviour of slanted-beam accelerometers.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Capacitive slanted-beam three-axis accelerometer: I. Modelling and design

Rödjegård¹,

Andersson²,

Rusu³

et al. 2005

J. Micromech. Microeng.

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Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been shown to have identical resolution and frequency responses in all directions. Here, a new and in-depth model of such accelerometers is presented. The theoretical model incorporates non-ideal effects such as the finite aspect ratio of the beam and the frequency-dependent squeezed gas-film damping. Sensitivity, resolution, transverse sensitivity and process errors are discussed. Prototype devices have been fabricated in a straightforward silicon process.

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Section: Prototype Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Capacitive slanted-beam three-axis accelerometer: I. Modelling and design

Rödjegård¹,

Andersson²,

Rusu³

et al. 2005

J. Micromech. Microeng.

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“…The basic idea as shown in [5] is a sensing element with a sensitivity axis which has an angle with respect to the wafer surface. This is realized by an asymmetric suspension of the torsional beams with respect to the center of mass.…”

Section: Multi-axial Low-g Sensormentioning

confidence: 99%

A Low-g Accelerometer for Inertial Measurement Units

Kapser¹,

Aikele²,

Gottinger³

et al.

Advanced Microsystems for Automotive Applications 2003

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Inertial Measurement Units (IMU) for upcoming automotive chassis control systems require sensor clusters with multi-axial sensors for acceleration and angular rate. In this paper, we present a low-g accelerometer that fits the IMU requirements for advanced automotive applications and is capable of monolithic multiple-axes integration. For the target application a high offset stability and an overcritical damping of the sensing element are required. With simple design changes the squeezed-film damping of the sensor can be adjusted within a wide range (5Hz to 400Hz) using atmospheric pressure inside the cavity. Due to its symmetrical design and the differential readout principle, an offset drift of less than 50mg over the full temperature range (-40°C…120°C) was achieved. The sensor principle presented in this paper can be utilized to realize a sensitivity axis parallel to the wafer surface as well as perpendicular to the surface. Furthermore, monolithic integration into a two-axis (x/z) or a three-axis (x/y/z) sensing element is possible. The tri-axial element exhibits a four-mass design providing redundancy and thus an ongoing self-test capability.

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