A New Instrument For Constant (B-Bo) Scatter Mapping Of Contiguous Optical Surfaces Of Up To 25 Square Inches

Silva, Robert M.; Orazio, Fred D.; Sledge, R.

doi:10.1117/12.945034

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Surface Metrology1

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1986

1988

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“…Namba (7) has been using X-ray scatter quite successfully for several years. Recent versions of BRDF (8) and TIS employ scanning for samples up about l0 cm in diameter and display data in color-coded patterns that are dramatically simple to interpret. Since some scatter could be both angle and orientation dependent, there is some concern that inaccuracies may be introduced because BRDF usually measures at a fixed scattering angle and orientation when in the scanning mode.…”

Section: Surface Metrologymentioning

confidence: 99%

Preparation of Ultrasmooth Surfaces

Brown¹

1986

Annu. Rev. Mater. Sci.

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Section: Surface Metrologymentioning

confidence: 99%

Preparation of Ultrasmooth Surfaces

Brown¹

1986

Annu. Rev. Mater. Sci.

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Inspection of Large Area and Large Volume Optics by Raster Scanning

Stover¹,

McGary²,

Rifkin³

1988

Optical Fabrication and Testing

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Scattered light is a problem in many optical systems. Increasingly, scatter is becoming recognized as the real issue with component specifications written in terms of the BSDF (bidirectional scatter distribution function) instead of the often less appropriate surface finish parameters (rms roughness, etc)[1,2]. Additionally, the presence of light scatter from a local area, on an otherwise uniform optic, indicates the presence of a defect or a contamination site. Unfortunately, complete sample coverage by full angle BSDF inspection is often impractical due to time and cost limitations imposed by sample size and/or sample numbers. For these situations a raster scanning technique which rapidly covers the required area may be the best solution. Raster data provides valuable insights into sample non-uniformity caused by production processes and contamination.

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A New Instrument For Constant (B-Bo) Scatter Mapping Of Contiguous Optical Surfaces Of Up To 25 Square Inches

Cited by 2 publications

References 0 publications

Preparation of Ultrasmooth Surfaces

Preparation of Ultrasmooth Surfaces

Inspection of Large Area and Large Volume Optics by Raster Scanning

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