A new kind of UHV piezotranslator

Abstract

A new kind of UHV compatible microdisplacement actuator has been developed. It is based on a piezoelectric translator bakable up to 150 °C, encapsulated in a stainless-steel housing. A metal bellows allows the movement of the actuator and it gives a suitable preload to compensate the vacuum load. This new actuator has a very low outgassing rate due to the external stainless-steel surface of the casing and to the UHV electrical feedthrough. The mechanical characteristics (resolution, load capability, stiffness) are similar to those available with standard non-UHV compatible piezos. This new kind of microdisplacement actuator can be used in an UHV environment without any significant effect on the ultrahigh vacuum. The vacuum test and the accuracy test in UHV have been performed and will be thoroughly described.