2014
DOI: 10.1007/978-3-319-09918-7_101
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A New Linear Motor with Two Piezoelectric Stacks Based on Differential Friction Effects

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Cited by 2 publications
(3 citation statements)
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“…Precision positioning technology has been widely employed in many areas of modern industry and scientific research [1][2][3]. Taking features of compact size, large output force, rapid response, and high resolution [4][5][6], piezoelectric actuators have been widely utilized to realize precision positioning. According to the working principle [7,8], piezoelectric actuators can be divided into direct driving actuators, inchworm actuators, ultrasonic actuators, stick-slip actuators, and so on.…”
Section: Introductionmentioning
confidence: 99%
“…Precision positioning technology has been widely employed in many areas of modern industry and scientific research [1][2][3]. Taking features of compact size, large output force, rapid response, and high resolution [4][5][6], piezoelectric actuators have been widely utilized to realize precision positioning. According to the working principle [7,8], piezoelectric actuators can be divided into direct driving actuators, inchworm actuators, ultrasonic actuators, stick-slip actuators, and so on.…”
Section: Introductionmentioning
confidence: 99%
“…High-precision positioning is an essential technology in a wide range of fields such as optics, microelectronics, microrobotics, biomedical science, precision measurements and semiconductor-based manufacturing [1][2][3][4][5]. It is not uncommon for a positioning system to be required to deliver stable motion with nanometer resolution and millimeter range while maintaining other positioning characteristics such as large loading capacity, wide speed range, and adequate accuracy [6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric materials have gained extensive attentions from researchers all over the world due to their advantages of small size, high resolution, large output force, high stiffness, rapid responses and so on [1][2][3][4][5]. Many high-precision actuators that have been developed are driven by piezoelectric materials [11,12].…”
Section: Introductionmentioning
confidence: 99%