2007
DOI: 10.1016/j.isatra.2006.06.003
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A new mechanism design of electro-magnetic actuator for a micro-positioner

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Cited by 21 publications
(8 citation statements)
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“…2.91×10 −6 1.43×10 all of the models match the measured data in the low-frequency range (ω < 10 2 ); however, the results for the conventional models do not match the measured data in the mid-and high-frequency ranges (10 2 < ω). The results obtained by the UD and NL models match the measured data in the high-frequency range (10 4 < ω); however, the results obtained by the UD model do not match the measured data in the mid-frequency range (10 2 < ω < 10 4 ) By using (1)- (5), the transfer function from f d (t) to x(t), G(s), is given by…”
Section: Design Of the Rc-shunt Circuitmentioning
confidence: 84%
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“…2.91×10 −6 1.43×10 all of the models match the measured data in the low-frequency range (ω < 10 2 ); however, the results for the conventional models do not match the measured data in the mid-and high-frequency ranges (10 2 < ω). The results obtained by the UD and NL models match the measured data in the high-frequency range (10 4 < ω); however, the results obtained by the UD model do not match the measured data in the mid-frequency range (10 2 < ω < 10 4 ) By using (1)- (5), the transfer function from f d (t) to x(t), G(s), is given by…”
Section: Design Of the Rc-shunt Circuitmentioning
confidence: 84%
“…It can also act as a sensor by utilizing the motional electromotive force generated from the motion of a coil in the magnetic field [4]. Application examples of the electromagnetic transducer include but are not limited to position control [5,6], sound amplification using loudspeakers [7,8,9,10,11], vibration isolation [12], valve actuation [13], load support magnetic bearings [14], magnetic levitation [15], vehicle suspension [16,17,18], and energy harvesting [19,20,21].…”
Section: Introductionmentioning
confidence: 99%
“…Stepanek et al [2] studied the dynamic behavior of the movement of a magnetic micro-actuator The electromagnetic micro-actuator with three diaphragms can be developed through fabrication, test results and finite element analysis [3]. Chen et al [4] proposed a new type of non-conventional electromagnetic actuator for micro-positioning. The electromagnetic damper was also used to actively reduce the vibration of singledegree-of-freedom suspension systems [5].…”
Section: Introductionmentioning
confidence: 99%
“…The electromagnetic micro-actuator with three diaphragms can be developed through either fabrication, test results, or finite element analysis (Kim et al, 2005). Chen et al (2007) proposed a new type of non-conventional electromagnetic actuator for micro-positioning. The electromagnetic damper also was used to actively reduce the vibration of 1-D.O.F suspension systems (Kim et al, 2001).…”
Section: Introductionmentioning
confidence: 99%