Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005.
DOI: 10.1109/icmts.2005.1452262
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A new method for precise evaluation of dynamic recovery of negative bias temperature instability

Abstract: It has been reported that the dynamic recovery of drain current (b) will take place soon after the stress applied on gate is removed during a Negative Bias Temperature Instability (NBTI) experiment of MOSFETs. This phenomenon makes it very difficult to correctly estimate NBTI degradation of Id (AId). This work presents a new characterization method in which the effect of the dynamic recovery is quantitatively taken into account to precisely estimate AId.

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Cited by 8 publications
(4 citation statements)
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“…Using DCIV, the density of the interface trap in p-MOSFETs can be precisely checked while transistors are under stress. A number of previous works [Chen et al 2002;Rangan et al 2003;Huard et al 2006;Aota et al 2005;Shen et al 2006;Ferńandez et al 2006] have employed a method that can probe current directly. Configurations based on ring oscillators were introduced in Kim et al [2008], Keane et al [2009], and Ketchen et al [2007].…”
Section: Measurement and Monitoringmentioning
confidence: 99%
“…Using DCIV, the density of the interface trap in p-MOSFETs can be precisely checked while transistors are under stress. A number of previous works [Chen et al 2002;Rangan et al 2003;Huard et al 2006;Aota et al 2005;Shen et al 2006;Ferńandez et al 2006] have employed a method that can probe current directly. Configurations based on ring oscillators were introduced in Kim et al [2008], Keane et al [2009], and Ketchen et al [2007].…”
Section: Measurement and Monitoringmentioning
confidence: 99%
“…To accurately measure the effects of NBTI, this measurement must be done quickly to avoid the effects of recovery, which has been reported to occur even for measurement windows of a few microseconds [7]. On-the-fly techniques that minimize the recovery effect have been examined in [6], [7], [9], [13], [14], and [16]. Denais et al proposed a measurement technique in which the stress voltage is kept quasi-constant while the linear drain current is measured to monitor device degradation.…”
Section: Previous Reliabiltiy Monitoring Techniquesmentioning
confidence: 99%
“…As discussed in previous sections, NBTI recovery was reported and explained within the frameworks of reaction-diffusion model [132], disorder-controlled-kinetics model [139], hole-trapping model [80,154,155] and deep-level hole-trapping model [161,162,[164][165][166], and it was also widely observed by other researchers [40,77,79,152,[167][168][169][170]. NBTI recovery could be closely associated with re-passivation of interface traps and hole de-trapping of oxide traps.…”
Section: Models For Nbti Recoverymentioning
confidence: 83%
“…As reviewed in Chapter 2, NBTI recovery phenomenon was widely observed and reported [40,77,79,152,[167][168][169][170]. In Chapter 3, some experimental investigations of ATTENTION: The Singapore Copyright Act applies to the use of this document.…”
Section: Physical Modeling Of Nbti Recovery and Dynamic Nbtimentioning
confidence: 99%