Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I &Amp; M. 1994 IEEE Instrumentation and Measuremen
DOI: 10.1109/imtc.1994.352064
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A new method to measure the distance between graduation lines on graduated scales

Abstract: Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small, graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to the time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of resu… Show more

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“…An optical microscope can be used to collimate the stripe edges. Photoelectric microscope systems were developed in several countries [3][4][5]. These systems use a slit aperture microscope to detect stripes with the same width as the slit.…”
Section: Introductionmentioning
confidence: 99%
“…An optical microscope can be used to collimate the stripe edges. Photoelectric microscope systems were developed in several countries [3][4][5]. These systems use a slit aperture microscope to detect stripes with the same width as the slit.…”
Section: Introductionmentioning
confidence: 99%