A new micro-EDM reverse copying technology for microelectrode array fabrication

Wang, Zhenlong; Dong, Desheng

doi:10.1049/cp:20061028

Cited by 7 publications

(3 citation statements)

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“…This improvement in term of MRR, EWR and dimensional accuracy can be explained by the discharge ratio increment, reduced arcing or short-circuit phenomena, as well as the effect of flushing mechanism [62]. Weiliang et al [63] conducted a similar experimental study to fabricate arrays of microelectrodes and microstructures using UVA-EDM. Their observation suggested increased MRR with the increase of voltage and increased efficiency of two-fold using 20 kHz frequency compared to pure EDM.…”

Section: Research On Ultrasonic Vibration Assisted Edmmentioning

confidence: 99%

Ultrasonic Vibration Assisted Electro-Discharge Machining (EDM)—An Overview

et al. 2019

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Many of the industrial processes, including material removal operation for shape generation on the surface of material, exploit the assistance of ultrasonic vibrations. This trend of using ultrasonic vibration in order to improve the process performance is becoming more and more prominent recently. One of the significant applications of this ultrasonic vibration is in the industrial processes such as Electro-discharge machining (EDM), where ultrasonic vibration (UV) is inserted as a medium for enhancing the process performance. Mostly ultrasonic vibration is applied along with the EDM process to increase the efficiency of the process through debris cleansing from the sparking gap. There have been significant changes in ultrasonic assisted technology during the past years. Due to its inherent advantages, ultrasonic assistance infiltrated in different areas of EDM, such as wire cut EDM, micro EDM and die sinking EDM. This article presents an overview of ultrasonic vibration applications in electric discharge machining. This review provides information about modes of UV application, impacts on parameters of performance, optimization and process designing on difficult-to-cut materials. On the bases of available research works on ultrasonic vibration assisted EDM, current challenges and future research direction to improve the process capabilities are identified. Literature suggested improved material removal rate (MRR), increased surface roughness (SR) and tool wear ratio (TWR) due to the application of ultrasonic vibration assisted EDM. However, tool wear and surface roughness can be lessened with the addition of carbon nanofiber along with ultrasonic vibration. Moreover, the application of ultrasonic vibration to both tool and workpiece results in higher MRR compared to its application to single electrode.

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Section: Research On Ultrasonic Vibration Assisted Edmmentioning

confidence: 99%

Ultrasonic Vibration Assisted Electro-Discharge Machining (EDM)—An Overview

et al. 2019

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“…Therefore, many researchers have combined these micro-EDM methods together to realize intricate part fabrication. Micro-protrudes and pits [4], micro array and holes [5,6], and micro turbine [7] have been successively fabricated by combined machining. Although these works show the advantageous of combined micro-EDM, no further study about the combining criterion and machining specification is investigated.…”

Section: Introductionmentioning

confidence: 99%

Study of Combined Process in Micro-EDM

Chu

Xue

et al. 2011

AMR

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Micro-EDM is a flexible process which has many technique methods such as forming, drilling, milling, copying and WEDM. Combined these methods together can enhance the EDM machining ability. In this paper a set of route design regulations used in combined machining is proposed. Through these regulations, the optimal route of combined process can be obtained which can improve high machining quality and efficiency. To test performance of the regulations, the combined route of a micro part is designed and its fabrication is performed at last.

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“…The reverse copying machining mechanism gives a new idea to fabricating microelectrode array by micro-EDM, microelectrode array can be made by reverse copying microhole array to a thicker rod electrode. It can generate intricate features with high aspect ratios and is capable of machining a large variety of conductive materials [4]. In this report, experiments for fabrication of microelectrode arrays and using microelectrode array to machine micro-hole array by ultrasonic enhanced micro-EDM are designed and technology parameters are assessed.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Microelectrode Array and Micro-Hole Array Fabricated by Ultrasonic Enhanced Micro-EDM

Zeng

Gong

Ying

et al. 2007

KEM

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Micro electrical discharge machining (EDM), enhanced with ultrasonic vibration, is explored and assessed as a method for developing microelectrode array, for microelectrode array fabricated by LIGA has shortcomings such as complex technology and high price. Based on the mechanism of micro-EDM, micro-hole array discharges to fabricate microelectrode array by reverse copying. In the process of reverse copying, the thicker rod electrode can not rotate, resulting in electric arc and short-circuit occurring easily, so it is necessary to add ultrasonic vibration on the plane plate electrode, in order to exclude debris as soon as possible and stabilize machining process. In the process of machining, four parameters, such as working voltage, working capacity, ultrasonic amplitude and holes spacing, are important to machining efficiency, each parameter has four typical values. In order to reduce experiment times, a scheme of orthogonal experiment was designed with different parameters combination. With result of experiments, the ratio of mean square deviation to error mean square deviation of each parameter was calculated and significance of each parameter was obtained, and the best parameters combination was asserted through theoretical calculation. Also, experimental study of using microelectrode array to machine micro-hole array by Micro- EDM was made and influence curve of each parameter was drawn. Finally, 5×5 arrays of microelectrode were obtained, the diameter of single electrode is less than about 30.m and heightto- width aspect ratios is more than 8, moreover, these microelectrode arrays have good coaxiality and surface quality.

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A new micro-EDM reverse copying technology for microelectrode array fabrication

Cited by 7 publications

References 0 publications

Ultrasonic Vibration Assisted Electro-Discharge Machining (EDM)—An Overview

Ultrasonic Vibration Assisted Electro-Discharge Machining (EDM)—An Overview

Study of Combined Process in Micro-EDM

Experimental Study of Microelectrode Array and Micro-Hole Array Fabricated by Ultrasonic Enhanced Micro-EDM

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