A new optimal design and analysis method based on MADM for MEMS products development

Prince, A. Amalin; Jose, Iven; Agrawal, Vikesh

doi:10.1007/s00170-012-3969-7

Cited by 1 publication

(3 citation statements)

References 15 publications

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“…Due to the intricate interdependencies in MEMS design and fabrication, this is usually not the case. Despite the reported efforts [36,38,[42][43][44][45][46], MEMS design is still dominated by an expertise-based approach. As highlighted by Sagoo et al [46], this leads to a number of iterations commonly experienced during the development of an MEMS device and its fabrication process.…”

Section: Discussionmentioning

confidence: 99%

“…This leads to the management of technology being the key methodology in MEMS design compared to the management of complexity in microelectronics, as elaborated by Brück et al [ 36 ]. Prince et al [ 42 ] conclude that the high cost of design for new devices leads to the industry being dominated by high-volume products. To lower the barriers for MEMS development, Esashi [ 34 ] suggests expanding collaboration between industry and academia in prototyping facilities.…”

Section: Introductionmentioning

confidence: 99%

“…They are related to the commonly used expertise-based design approach and the technological limitations of available processes. Prince et al [ 42 ] propose an optimum design method for MEMS development using multiple attribute decision making. Applying parameter sensitivity analysis, the effects on the final device can be evaluated at every stage of the development phase.…”

Section: Introductionmentioning

confidence: 99%

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What MEMS Research and Development Can Learn from a Production Environment

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The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome challenges and facilitate volume production. By now, these are only hesitantly being picked up and implemented in academic research. In this perspective, the applicability of these methods to research-focused MEMS development is investigated. It is found that even in the dynamics of a research endeavor, it is beneficial to adapt and apply tools and methods deduced from volume production. The key step is to change the perspective from fabricating devices to developing, maintaining and advancing the fabrication process. Tools and methods are introduced and discussed, using the development of magnetoelectric MEMS sensors within a collaborative research project as an illustrative example. This perspective provides both guidance to newcomers as well as inspiration to the well-versed experts.

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