A New Precision Digital Phase Meter and Its Simple Calibration Method

Kawagoe, J.; Kawasaki, T.

doi:10.1109/tim.2009.2024366

Cited by 9 publications

(3 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Because of the unavoidable surface non-flatness, non-orthogonality, scale difference, etc., in the metrology systems, there exists systematic measurement error (i.e., stage error), which is the difference between the actual metrology system and the ideal metrology system [6]. The common way to determine the stage error map in Cartesian space needs traditional calibration technology [7,8] with a rather standard measurement plate or scale for direct "high-precision calibrates low-precision". If the stage error can be figured out, the measurement accuracy of the metrology system in the stage could be determined and compensated, which will improve the positioning accuracy and repeatability of practical motion systems [9,10].…”

Section: Introductionmentioning

confidence: 99%

Self-Calibration of Two-Dimensional Precision Metrology Systems

Hu¹,

Zhu²

2016

New Trends and Developments in Metrology

View full text Add to dashboard Cite

In modern industry, there usually exist high-precision stages, such as reticle stages and wafer stages in VLSI lithography tools, metrology stages in coordinate measurement machines, motion stages in CNC machine tools, etc. These stages need high-precision measurement/metrology systems for monitoring its XY movement. "s the metrology systems are quite accurate, we often cannot find a standard tool with better accuracy to implement a traditional calibration process for systematic measurement error i.e., stage error determination and measurement accuracy compensation. Subsequently, selfcalibration technology is developed to meet this challenge and to solve the calibration problem. In this chapter, we study the self-calibration of two-dimensional precision metrology systems and present a holistic self-calibration strategy. This strategy utilizes three measurement views of an artifact plate with mark positions not precisely known on the un-calibrated two-dimensional metrology stage and constructs relevant symmetry, transitivity, and redundancy of the stage error of the metrology stage. The misalignment errors of all measurement views, especially including those of the translation view, are totally determined by detailed mathematical manipulations. Then, a redundant equation group is synthesized, and a least-square based robust estimation law is employed to calculate out the stage error even under the existence of random measurement noise. Furthermore, as the determination of the misalignment error components of the measurement views is rather complicated but important in previous and the proposed methods, this chapter also significantly analyzes the necessity of this costly computation. The proposed approach is investigated by simulation computation, and the simulation results prove that the proposed determination scheme can calculate out the stage error rather exactly without random measurement noise. Furthermore, when there exist various random measurement noises, the calibration accuracy of the proposed strategy is also investigated, and the results illustrate that the standard deviations of the calibration error are consistently with the same level of those of the random measurement noises. "ll these results verify that the proposed scheme can realize the stage error rather accurately even under the existence of random measurement noise. The practical © 2016 The Author(s). Licensee InTech. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. procedure for performing a standard self-calibration is also introduced for engineers to facilitate actual implementation. Keywords: Self-calibration, Metrology system, Stage error, Measurement noise, VLSI lithography . IntroductionModern precision applications such as VLSI lithography tools, CNC machine tools, and coordinate measurement machines usually need multi-...

show abstract

Section: Introductionmentioning

confidence: 99%

Self-Calibration of Two-Dimensional Precision Metrology Systems

Hu¹,

Zhu²

2016

New Trends and Developments in Metrology

View full text Add to dashboard Cite

show abstract

“…Today it is possible to achieve uncertainties about 0.5 millidegree [2]. Fast Fourier transform has some drawbacks, such as requirement of coherent sampling, which can be eliminated by fitting of the sampled waveform by various analytical functions [3], [4].…”

Section: Introductionmentioning

confidence: 99%

Uncertainty analysis of non-coherent sampling phase meter with four parameter sine wave fitting by means of Monte Carlo

Šíra

Maslan

2014

29th Conference on Precision Electromagnetic Measurements (CPEM 2014)

View full text Add to dashboard Cite

Uncertainty analysis of a very simple sampling phase meter based on four parameter sine wave fitting is presented in this paper. An uncertainty of a sample time and a measured voltage is assigned to every sampled point and a total uncertainty of a phase difference is calculated by means of the Monte Carlo method. Results show the total uncertainty is lower than 0.5 millidegree for selected digitizer. A noise of the measured signal or the digitizer is the largest contribution to the total uncertainty.Index Terms-measurement uncertainty, phase difference, Monte Carlo, sine wave fitting.

show abstract

“…Due to surface nonflatness, nonorthogonality, and scale difference, there generally exists stage error in the metrology systems [6]. Usually, the calculation of the stage error needs calibration technology [7], [8] with a standard measurement scale. Once the stage error is exactly known, the measurement compensation of the positioning accuracy and repeatability of precision motion systems will become more accurate [9], [10].…”

Section: Introductionmentioning

confidence: 99%

A Holistic Self-Calibration Algorithm for $xy$ Precision Metrology Systems

Zhu

et al. 2012

IEEE Trans. Instrum. Meas.

View full text Add to dashboard Cite

Self-calibration technology is an important approach with the utilization of an artifact plate with mark positions that are not precisely known to calibrate the precision metrology system. In this paper, we study the self-calibration of xy precision metrology systems and present a holistic self-calibration algorithm based on the least squares method. The proposed strategy utilizes three traditional measurement views of an artifact plate on the xy metrology stage and provides relevant symmetry, transitivity, and redundancy. The misalignment errors of all measurement views, particularly errors of the translation view, are totally determined by detailed mathematical manipulations. Consequently, a leastsquares-based robust estimation law is synthesized to calculate the stage error even under the existence of random measurement noise. Computer simulation validates that the proposed method can accurately realize the stage error when there is no random measurement noise. Furthermore, the calculation accuracy of the proposed scheme under various random measurement noises is studied, and the results verify that the proposed algorithm can effectively attenuate the effects of random measurement noise. The proposed strategy, in fact, provides a well-understood solution to the xy self-calibration problem for engineers in practical applications.Index Terms-Least squares, measurement noise, selfcalibration, stage error, xy metrology system.

show abstract

A New Precision Digital Phase Meter and Its Simple Calibration Method

Cited by 9 publications

References 9 publications

Self-Calibration of Two-Dimensional Precision Metrology Systems

Self-Calibration of Two-Dimensional Precision Metrology Systems

Uncertainty analysis of non-coherent sampling phase meter with four parameter sine wave fitting by means of Monte Carlo

A Holistic Self-Calibration Algorithm for $xy$ Precision Metrology Systems

Contact Info

Product

Resources

About