A new preparation method for sputtered MoO3 multilayers for the application in gas sensors

Gas sensing properties of thermally evaporated lamellar MoO3

“…MoO 3 has been well known for its application as a catalyst for the oxidation of hydrocarbons and reduction of NO x in the chemical and petroleum industry [11][12][13][14]. Efforts were also made to examine and improve the gas sensing properties of MoO 3 based devices to detect H 2 [10,15], CO [15,16], NH 3 [10,12,17], and LPG [10]. Imawan et al [17] studied the RF sputtered MoO 3 thin films for sensing responses to various gases, including CO, CH 4 , SO 2 , NO 2 and NH 3 in the temperature range of 250 • C and 475 • C. They revealed that MoO 3 was highly sensitive to NH 3 at 425 • C and that the gas sensitivity dropped with decreasing film thickness (<300 nm).…”

Development of Molybdenum Trioxide (MoO3) by Spin Coating Method for Photovoltaic Application

“…Because of its layered structure, MoO 3 is primarily studied in relation to its electrochromic and photochromic properties, for application as smart windows and display devices [3,4]. It also used in gas sensing and catalytic research fields [5]. However, this material has band gap value (1.7 eV) well-matched to the solar spectrum [6], which makes it interesting to be an active element in a solar cell(absorber layer).…”

“…E-mail: chibane83@yahoo.fr. method [6], Thermal spray method [7], Electrosynthesis method [2], chemical vapor transport method (CVT) [8,9], magnetron sputtering method [5] and several others. Each method provides various advantages and disadvantages.…”

Preparation of MoO3Thin Films by Spray Pyrolysis and its Gas Sensing Performance

“…MoO 3 has been well known for its application as a catalyst for the oxidation of hydrocarbons and reduction of NOx in the chemical and petroleum industry [9][10][11][12]. Efforts were also made to examine and improve the gas sensing properties of MoO 3 based devices to detect H 2 [8,13], CO [13,14], NH 3 [8,10,15], and LPG [8]. Imawanet al [15] studied the RF sputtered MoO3 thin films for sensing responses to various gases, including CO, CH 4 , SO 2 , NO 2 Multilayered sputter deposited MoO 3 by the same research group resulted in improved H 2 sensing properties and low cross sensitivity towards NH 3 [13].…”

“…Efforts were also made to examine and improve the gas sensing properties of MoO 3 based devices to detect H 2 [8,13], CO [13,14], NH 3 [8,10,15], and LPG [8]. Imawanet al [15] studied the RF sputtered MoO3 thin films for sensing responses to various gases, including CO, CH 4 , SO 2 , NO 2 Multilayered sputter deposited MoO 3 by the same research group resulted in improved H 2 sensing properties and low cross sensitivity towards NH 3 [13]. It is also shown that the sensitivity and selectivity to target gases can be altered by adding other metal oxides to MoO 3 [16,17].…”