A new program for the design of electron microscopes

The correction of electron lens aberrations

“…This performance, about 20 times the electron wavelength at 120 keV energy, allows dynamic imaging of single atoms, clusters of a few atoms, and single atomic layer 'rafts' of atoms coexisting with Au islands on a carbon substrate" [4]. Although the evidence presented by Batson was not accepted uncritically, all such reservations were swept away in the paper by Nellist et al [134], in which the pairs of silicon columns in a silicon crystal observed in the [112] orientation were imaged in a VG HB603U 300 kV STEM equipped with the Nion corrector. With a probe-size of the order of 60 pm, the columns 78 pm apart are clearly visible in the ADF image (Fig.…”

Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM

“…The configuration in Figure 2 was modelled using the EOD software [12]. The field of the lens was computed, taking the magnetic saturation into account, so that a virtual crossover at = −150 mm is imaged to = 5 mm.…”

Optimization of ion-atomic beam source for deposition of GaN ultrathin films

“…The position of each functional part of the source was optimized by simulations of ion trajectories using an EOD software package. 17 The trajectories corresponding to nitrogen ions are depicted in Fig. 1(b).…”

“…Design of the ion-atomic beam source: (a) cross section and (b) simulation of nitrogen ion trajectories (in pink) by the EOD 213 software package 17. 3 × 10 −8 Pa and thermally flashed by direct resistive heating up to 1250 • C (1-2 min in total) to provide the surface with the Si(111) 7 × 7 reconstruction.…”