A new three degrees-of-freedom motion sensor based on laser-self-mixing with pigtailed sources

Abstract

Real time simultaneous measurement by remote laser source of long range longitudinal displacement and small angle wobbling of a sliding target is demonstrated. The compact selfaligned laser-self-mixing interferometer achieves 0.8 μm axial resolution over 1 m linear and 17 μrad of pitch and yaw resolution over 2 mrad angular ranges, respectively.