In this paper a potential based model for monocrystalline silicon thin film transistor (TFT) systems on glass (SOG) substrate from the accumulation to the strong-inversion region is developed. By solving the complete dimensional (1D) Poisson's equation, the potential distribution in the channel is obtained. The analytic drain current is expressed accurately base on the potential solution. Compared with TCAD simulations, the proposed current model shows less than 1.05% errors, with the doping concentrations ranging from 1.5×10 16 cm -3 to 1.5×10 18 cm -3 and different bias conditions. The proposed model is appropriate for precise and quick circuit simulation.
IntroductionThin film transistors (TFT), which are monolithically integrated on a glass substrate system (SOG) [1], have received a great deal of attention as a promising device structure in many appliances [2]. As the device's scaling down, an efficient and accurate compact mode is more important than before in circuit simulation. Recently, many potential based compact models are based on charge sheet approximation [3]. However, there exists no effective compact model applicable for TFT on glass substrate. Therefore, for SOG TFT a more accurate and efficient compact model is needed. In this paper, a method of potential calculation is developed to solve 1-D Poisson's equation in TFT device on glass substrate. Based on the potential solutions, a more accurate current model is obtained. This model is that it offers more accuracy compared with charge-sheet model [3] for a wide range of doping concentrations and bias conditions by using TCAD as a standard. The model here is applicable for Monocrystalline TFT devices.