A non-equilibrium atmospheric pressure Capacitively-Coupled-Plasma (CCP) driven at VHF (162 MHz) for plasma catalysis of CO2 into CO

Harvey, Cleo; Vandenburg, S.; Ellingboe, A. R.

doi:10.1016/j.cap.2021.04.016

Cited by 5 publications

(1 citation statement)

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“…Besides the numerical studies, we conduct experiments as well, to be able to benchmark some of the computed characteristics with measured data. These include (i) the spatial distribution of the time-averaged wavelength-integrated optical emission of the plasma and (ii) the phase shift between the discharge voltage and current [37][38][39]. Both of these characteristics change with varying the pressure and provide, therefore, important checks for the simulation results.…”

Section: Introductionmentioning

confidence: 99%

Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures

Vass

Wilczek

Derzsi

et al. 2022

Plasma Sources Sci. Technol.

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The physical characteristics of an argon discharge excited by a single-frequency harmonic waveform in the low-intermediate pressure regime (5-250 Pa) are investigated using Particle-in-Cell/Monte Carlo Collisions simulations. It is found that, when the pressure is increased, a non-negligible bulk electric field develops due to the presence of a ``passive bulk'', where a plateau of constant electron density forms. As the pressure is increased, the ionization in the bulk region decreases (due to the shrinking of the energy relaxation length of electrons accelerated within the sheaths and at the sheath edges), while the excitation rate increases (due to the increase of the bulk electric field). Using the Fourier spectrum of the discharge current, the phase shift between the current and the driving voltage waveform is calculated, which shows that the plasma gets more resistive in this regime. The phase shift and the (wavelength-integrated) intensity of the optical emission from the plasma are also obtained experimentally. The good qualitative agreement of these data with the computed characteristics verifies the simulation model. Using the Boltzmann term analysis method, we find that the bulk electric field is an Ohmic field and that the peculiar shape of the plasma density profile is partially a consequence of the spatio-temporal distribution of the ambipolar electric field.

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Section: Introductionmentioning

confidence: 99%