Based on the difficult machining characteristics of silicon nitride materials, this manuscript focuses on optimizing the precision machining process of silicon nitride bearing components and improving the machining efficiency and quality of silicon nitride bearing components. Firstly, the mechanism of crack formation and propagation in hard and brittle materials under the action of abrasive particles is discussed in this paper, and based on this, a kinematic model of single abrasive grain cutting on hard and brittle materials is established. The effect of workpiece linear velocity, grinding wheel linear velocity, grinding wheel oscillation velocity and feed velocity on inner surface roughness of Si3N4 ring was discussed through grinding test. The experimental results show that the surface roughness can reach about Ra0.20~Ra0.33μm through a large number of grinding experiments by adjusting the combination of process parameters μ m. On this basis, use the optimized process parameters calculated by the surface quality prediction model constructed in this manuscript to conduct grinding test again, and the surface roughness value reaches about Ra0.19~Ra0.23μm. The purpose of optimizing the process parameters is realized. Finally, the surface roughness can be further reduced and maintained at Ra0.05~Ra0.06μm by further superfinishing the surface after the process optimization with an oilstone. The research work of this manuscript realized the optimization of precision machining process of silicon nitride bearing ring and the rapid optimization of machining process through the established prediction model, which improved the precision machining efficiency of ceramic bearing components. Through the study of this manuscript, a process route of controllable processing of inner surface quality of Si3N4 ring is formed, from preliminary selection of process parameters by optimization model to precision grinding and then to ultra-finishing of whetstone, which provides theoretical reference for efficient and precise manufacturing of practical bearing components.