A normally closed electrostatic parylene microvalve for micro total analysis systems

Yıldırım, Ender; Arikan, M. A. Sahir; Külah, Haluk

doi:10.1016/j.sna.2012.05.008

Cited by 46 publications

(23 citation statements)

References 27 publications

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“…3d), in close agreement with a model we developed previously [24]. We and others have also shown elsewhere that shifting the position of the valve seat to an off-center location can concentrate stresses on one side of the barrier, thus reducing the force needed to actuate the valves [19], [26]. We observed similar results in the present system.…”

Section: Resultssupporting

confidence: 92%

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Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Tice

Rosheck

Hamlin

et al. 2013

J. Microelectromech. Syst.

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Section: Resultssupporting

confidence: 92%

“…Here, we adopt a normally-closed architecture, similar to the design of Külah et al [19], where, to avoid electrode screening, solutions do not pass between the electrodes. This approach completely eliminates the need for pneumatic components and ancillaries.…”

Section: Introductionmentioning

confidence: 99%

Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Tice

Rosheck

Hamlin

et al. 2013

J. Microelectromech. Syst.

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“…Although several polymers including Parylene [24], Teflon [25], or polyimide [26] are relatively chemically inert and used in microchip materials, they still have high permeability as compared to glass, or are not optically transparent. Recently, glass coating methods with PDMS microchannels were developed in order to generate chemical stability [27], but these methods are difficult to apply to actuating parts.…”

Section: Introductionmentioning

confidence: 99%

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Tanaka¹

2014

Micromachines

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Lab-on-a-chip technology is promising for the miniaturization of chemistry, biochemistry, and/or biology researchers looking to exploit the advantages of a microspace. To manipulate fluid on a microchip, on-chip pumps are indispensable. To date, there have been several types of on-chip pumps including pneumatic, electroactive, and magnetically driven. However these pumps introduce polymers, metals, and/or silicon to the microchip, and these materials have several disadvantages, including chemical or physical instability, or an inherent optical detection limit. To overcome/avoid these issues, glass has been one of the most commonly utilized materials for the production of multi-purpose integrated chemical systems. However, glass is very rigid, and it is difficult to incorporate pumps onto glass microchips. This paper reports the use of a very flexible, ultra-thin glass sheet (minimum thickness of a few micrometers) to realize a pump installed on an entirely glass-based microchip. The pump is a peristaltic-type, composed of four serial valves sealing a cavity with two penetrate holes using ultra-thin glass sheet. By this pump, an on-chip circulating flow was demonstrated by directly observing fluid flow, visualized via polystyrene tracking particles. The flow rate was proportional to the pumping frequency, with a maximum flow rate of approximately 0.80 μL/min. This on-chip pump could likely be utilized in a wide range of applications which require the stability of a glass microchip.

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“…The same group published design considerations for electrostatic microvalves in PDMS-based microfluidics [80]. In [81] a normally closed electrostatic valve structure was demonstrated which isolates the fluid from the electric field, hence featuring relatively low actuation potentials (\60 V), and in [82] an electrostatic valve with liquid metal-elastomer-compliant electrodes was presented. A brief overview of the different techniques for making stretchable metal interconnects on polymers was given in [83].…”

Section: Layered Pdms Structuresmentioning

confidence: 99%

Stimulus-active polymer actuators for next-generation microfluidic devices

Hilber

2016

Appl. Phys. A

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Microfluidic devices have not yet evolved into commercial off-the-shelf products. Although highly integrated microfluidic structures, also known as lab-on-a-chip (LOC) and micrototal-analysis-system (lTAS) devices, have consistently been predicted to revolutionize biomedical assays and chemical synthesis, they have not entered the market as expected. Studies have identified a lack of standardization and integration as the main obstacles to commercial breakthrough. Soft microfluidics, the utilization of a broad spectrum of soft materials (i.e., polymers) for realization of microfluidic components, will make a significant contribution to the proclaimed growth of the LOC market. Recent advances in polymer science developing novel stimulus-active soft-matter materials may further increase the popularity and spreading of soft microfluidics. Stimulus-active polymers and composite materials change shape or exert mechanical force on surrounding fluids in response to electric, magnetic, light, thermal, or water/solvent stimuli. Specifically devised actuators based on these materials may have the potential to facilitate integration significantly and hence increase the operational advantage for the end-user while retaining costeffectiveness and ease of fabrication. This review gives an overview of available actuation concepts that are based on functional polymers and points out promising concepts and trends that may have the potential to promote the commercial success of microfluidics.

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A normally closed electrostatic parylene microvalve for micro total analysis systems

Cited by 46 publications

References 27 publications

Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Stimulus-active polymer actuators for next-generation microfluidic devices

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