2023
DOI: 10.3390/mi14030696
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A Novel Analog Interpolation Method for Heterodyne Laser Interferometer

Abstract: Laser interferometer technology is used in the precision positioning stage as an encoder. For better resolution, laser interferometers usually work with interpolation devices. According to the interpolation factor, these devices can convert an orthogonal sinusoidal signal into several square-wave signals via digital processing. The bandwidth of the processing will be the limitation of the moving speed of the positioning stage. Therefore, the user needs to make a trade-off between the interpolation factor and t… Show more

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“…The resulting signals are then digitized using an analogto-digital converter (ADC) and processed via a phase solution algorithm and subdivision process. The displacement result is obtained from the phase information [5][6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…The resulting signals are then digitized using an analogto-digital converter (ADC) and processed via a phase solution algorithm and subdivision process. The displacement result is obtained from the phase information [5][6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%