2023
DOI: 10.1109/tcpmt.2023.3298378
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A Novel Approach for Cooling Chiplets in Heterogeneously Integrated 2.5-D Packages Applying Microchannel Heatsink Embedded in the Interposer

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Cited by 2 publications
(2 citation statements)
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“…have delved into the optimization of a micro-TEC embedded within a cavity etched in the thermal interface material (TIM) layer atop a 3D integrated architecture and this setup connects to a heat spreader layer. Nevertheless, challenges emerge when photonic and electronic chips within a 2.5D configuration possess different thicknesses, leading to varying thicknesses of the TIM layer connected to the heat spreader 13 . This necessitates the redesign and fabrication of the micro-TEC with distinct thicknesses for effective thermal control of the photonic and electronic chips.…”
Section: Introductionmentioning
confidence: 99%
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“…have delved into the optimization of a micro-TEC embedded within a cavity etched in the thermal interface material (TIM) layer atop a 3D integrated architecture and this setup connects to a heat spreader layer. Nevertheless, challenges emerge when photonic and electronic chips within a 2.5D configuration possess different thicknesses, leading to varying thicknesses of the TIM layer connected to the heat spreader 13 . This necessitates the redesign and fabrication of the micro-TEC with distinct thicknesses for effective thermal control of the photonic and electronic chips.…”
Section: Introductionmentioning
confidence: 99%
“…Nevertheless, challenges emerge when photonic and electronic chips within a 2.5D configuration possess different thicknesses, leading to varying thicknesses of the TIM layer connected to the heat spreader. 13 This necessitates the redesign and fabrication of the micro-TEC Fig. 1 Schematic showing different approaches of thermoelectric cooler integration in a photonic package where photonic integrated chip (PIC) and electronic integrated chip (EIC) are copackaged together on a glass substrate where the implementation of (a) macro-thermoelectric cooler (Macro-TEC); (b) micro-TEC (μ-TEC); and (c) SimTEC in photonic packages is highlighted.…”
mentioning
confidence: 99%