A novel approach for determining the minimum feed in nanochannels processing via molecular dynamics simulation

Ren, Jiaqi; Dong, Zeguang; Zhao, Jinsheng; Liu, Pinkuan

doi:10.1016/j.apsusc.2016.02.024

Cited by 7 publications

(6 citation statements)

References 32 publications

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“…Ren et al investigated the effect of tip angles on cutting forces with cone shape tip. It is found that forces increase with the increasing semi-apex angles due to growth of the contact area between tip and workpiece materials [ 21 ]. Besides, the friction coefficient decreases strongly with semi-apex, while the hardness increases [ 75 ].…”

Section: Analysis Of Simulation Resultsmentioning

confidence: 99%

“…Tip geometry is generally complex and variable including cone shape [ 40 ], triangular pyramid [ 18 ] and hemisphere (blunt shape) [ 21 ], which plays an important role in TBN process. In particular, the shape of the pyramid tool in MD model is consistent with that in the AFM machining process and the spherical tool is consistent with the abrasive grain in the grinding process; thus, the machining mechanism can be better explained by comparing the simulation results with the experimental results.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…It is also crucial to select the suitable potential energy functions which determine the credibility of the simulation results [ 21 ]. EAM is a multibody potential suited for metallic systems [ 24 ].…”

Section: Simulation Methodsmentioning

confidence: 99%

“…In order to fabricate nanogrooves with higher density, the minimum feed (MF) should be studied. Ren et al presented a novel approach which involves a coarse-to-fine criterion to determine MF with the use of MD simulations [ 21 ]. The results show that MF of high accuracy is obtained.…”

Section: Introductionmentioning

confidence: 99%

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Molecular Dynamics Study on Tip-Based Nanomachining: A Review

et al. 2020

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Tip-based nanomachining (TBN) approaches has proven to be a powerful and feasible technique for fabrication of microstructures. The molecular dynamics (MD) simulation has been widely applied in TBN approach to explore the mechanism which could not be fully revealed by experiments. This paper reviews the recent scientific progress in MD simulation of TBN approach. The establishing methods of the simulation model for various materials are first presented. Then, the analysis of the machining mechanism for TBN approach is discussed, including cutting force analysis, the analysis of material removal, and the defects analysis in subsurface. Finally, current shortcomings and future prospects of the TBN method in MD simulations are given. It is hopeful that this review can provide certain reference for the follow-up research.

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Section: Analysis Of Simulation Resultsmentioning

confidence: 99%

Section: Simulation Methodsmentioning

confidence: 99%

Section: Simulation Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Molecular Dynamics Study on Tip-Based Nanomachining: A Review

et al. 2020

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“…AFM may also be used to fabricate nanoscale structures using techniques often referred to, with or without the prefix "tip-based, " (Kawasegi et al, 2006;Bourne et al, 2010;Ren et al, 2016) or "nano, " as lithography (Ogino et al, 2008), machining (Yan et al, 2015), manufacturing (Fang et al, 2017), or scratching (Huang et al, 2011). Typically, patterns are fabricated either by applying a high normal loading force to the surface to remove material or by using an electrical bias to inject or collect current and so induce material restructuring (i.e., by local anodic oxidation) (Xie et al, 2006;Garcia et al, 2014).…”

Section: Introductionmentioning

confidence: 99%

Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

Buckwell

Hudziak

et al. 2019

Front. Mater.

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The atomic force microscope (AFM) empowers research into nanoscale structural and functional material properties. Recently, the scope of application has broadened with the arrival of conductance tomography, a technique for mapping current in three-dimensions in electronic devices by gradually removing sample material with the scanning probe. This technique has been valuable in studying resistance switching memories and solar cells, although its broader use has been hindered by a lack of understanding of its reliability and practicality. Implementation can be preclusive, owing to difficulties in characterizing tip-sample interactions and accounting for probe degradation, both of which are crucial factors in process efficacy. This work follows the existing conductance tomography literature, presenting an insight into the repeatability and reliability of the material removal processes. The consistency of processes on a hard oxide and a softer metal are investigated, to understand the critical differences in etching behavior that might affect tomography measurements on heterostructures. Individual probe behavior stabilizes following a wearing-in stage and etching processes are consistent between probes, in particular on oxide. However, process inconsistency increases with applied force on metal. The effects of scan angle, tip speed and feedback gain are therefore explored and their tuning found to improve the spatial consistency of material removal. With these findings, we aim to present a critical study of the implementation of tomography with the AFM in order to contribute to its methodological development.

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