2005
DOI: 10.3182/20050703-6-cz-1902.01594
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A Novel Approach of Thermal Process Control for Uniform Temperature

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Cited by 6 publications
(5 citation statements)
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“…In the recent process control, temperature controller with gradient temperature control (GTC) algorithm proposed in Matsunaga (2005) are utilized for uniform control of heat plate in the manufacturing process. With simple proof, it is confirmed that GTC is one type of the controller proposed in this paper.…”
Section: Design Of Uniform Temperature Control Based On Tdmmentioning
confidence: 99%
See 1 more Smart Citation
“…In the recent process control, temperature controller with gradient temperature control (GTC) algorithm proposed in Matsunaga (2005) are utilized for uniform control of heat plate in the manufacturing process. With simple proof, it is confirmed that GTC is one type of the controller proposed in this paper.…”
Section: Design Of Uniform Temperature Control Based On Tdmmentioning
confidence: 99%
“…The feature of the TDM is to represent thermal interference explicitly with the feedback temperature difference. The design methods of uniform temperature controller and decoupler based on one dimensional TDM were proposed and the effectiveness of these controller was demonstrated in experiments (Nanno (2007), Matsunaga (2005)). However, the control system for practical two dimensional heat plate has not been discussed yet.…”
Section: Introductionmentioning
confidence: 99%
“…These difficulties have a significant impact on the transient response and temperature difference. Thus, some advanced compensation methods have been proposed: feed forward compensation, data-driven tuning, and gradient temperature control [18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%
“…These difficulties will have a great impact on the transient response and the steady-state stability of the controlled system. Thus more and more advanced compensation methods have been proposed to compensate the influence of each point and uniform the output of multi-point systems such as feedforward compensation, the data-driving method and the gradient control method [17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%