A Novel Bistable Two-Way Actuated Out-of-Plane Electrothermal Microbridge

Michael, Aron; Kwok, Chee Yee; Yu, Kegen; Mackenzie, M.

doi:10.1109/jmems.2007.911369

Cited by 23 publications

(13 citation statements)

References 28 publications

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“…The shape of bistable beams can be realized by initial buckling or can be deliberately pre-shaped during fabrication. The buckling can be obtained by axial compression [33][34][35], heating expansion [36][37][38], or residual stresses [39][40][41]. A straight beam after buckling is always bistable and the snap-through behavior is symmetric between the two sides of buckling.…”

Section: Introductionmentioning

confidence: 99%

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Hussein

Younis

2020

Journal of Mechanisms and Robotics

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We derive the snap-through solution and the governing snapping force equations for an arbitrarily pre-shaped beam deflected under a mid-length lateral point force. The exact solution is obtained based on the classical theory of elastic beams as a superposition of the initial shape and the modes of buckling. Two kinds of solution are identified depending on the axial force level. The two solutions, bifurcation conditions, bistability conditions, and the snapping force equations are derived and discussed. The snap-through and snapping force solutions are then calculated for two common beam initial shapes, the curved (first buckling shape) and the inclined one (V-shape). In both cases, explicit expressions are obtained describing the snap-through behavior. The analytical modeling results show excellent agreement with the finite element simulations. The comparison between the two cases shows a similar snap-through behavior qualitatively, while several differences and similarities are noticed quantitatively.

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Section: Introductionmentioning

confidence: 99%

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Hussein

Younis

2020

Journal of Mechanisms and Robotics

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“…The micro-mirror can be included into the micro-bridge model proposed previously [12] as a rigid block of mass whose flexural rigidity is much higher than that of the micro-bridge and attached to the middle portion of the microbridge. The model including the micro-mirror is shown in Fig.…”

Section: Modelingmentioning

confidence: 99%

“…Therefore, a development of a suitable actuator to satisfy the above requirements is very critical for MEMS optical switch to deliver an overall better system performance such as low power consumption as a result of bi-stability, compactness and low cost as a result of out-of-plane actuation and PLC integration with IC-circuit as a result of low voltage drivability. We have reported in our previous publications [9][10][11][12] the development of such a novel actuator. However, a micro-mirror has never been integrated with the actuator.…”

Section: Introductionmentioning

confidence: 99%

A novel out-of-plane micro-mirror actuator

2007

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A novel micro-bridge actuator that can satisfy the important requirements for optical switching has been designed, fabricated and tested. These important properties of the actuator include bi-stability, large out-of-plane movement, bidirectionality and electro-thermal actuation. The monolithic integration of a micro-mirror with this actuator is critical to demonstrate its application for optical switching in planar light circuits. In this paper, the design, simulation, fabrication and testing of the integrated system will be presented. The design and simulation issues include (i)the design of the micro-mirror that can be integrated and yet maintain the bi-stability behavior of the micro-bridge (ii) ANSYS simulations to substantiate the design (iii) the design of the dimensions of the mask lay-out of the micromirror to provide the desired micro-mirror size on the micro-bridge. The integrated system was fabricated on (110) oriented wafer. A vertical flat mirror, with verticality of 89.5 o and a roughness of about 10nm has been obtained. The fabricated optical switch is laser diced, packaged, wire-bonded and tested. A free space optical path is established by micro-positioning optical fibers on the surface of the wafer in etched grooves to demonstrate optical switching. The optical system is actuated between the ON and OFF positions by driving 16mA and 10mA currents through the legs and bridge parts of the micro-bridge for respectively.

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“…If the leg is heated toT , then the lateral movement 9~~~~~l eg introduced as a result of expansion of the legs, neglecting the axial stiffness of the spring, is given by x =2T L ce L leg leg Si (6) In order to use the model, the bridge modeling parameters, namely torsional stiffness, axial stiffness, and residual moments, need to be determined first. These parameters are calculated using expressions derived in [13]. The modeling parameters are calculated to be [15].…”

Section: Si I Imentioning

confidence: 99%

Thermo-elastic Behavior of Buckled Multi-layered MEMS Bridge: Model and Experiment

Michael

Kwok

2006

2006 5th IEEE Conference on Sensors

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In this paper, we have obtained thermo-elastic model which takes into account elastically constrained boundary conditions and residual moment in the buckled bridge and verified experimentally. A novel micro-bridge with legs and spring attachments at either supporting ends to provide elastically constrained boundary conditions is fabricated, packaged, wire bonded to carry out the experiment. The micro-bridge is electro-thermally actuated inside a SEM while the mechanical deflection is measured in situ. Employing heat transfer analysis in the vacuum and 3D finite element ANSYS simulation, the temperatures of the legs and bridge are estimated. The model is then solved at these temperatures and compared with the measured results. A good agreement is obtained between the measured result and the model with 0.5,um error. The snapping temperatures predicted by the model and measured experimentally are also in a good agreement with only 7 % error.

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A Novel Bistable Two-Way Actuated Out-of-Plane Electrothermal Microbridge

Cited by 23 publications

References 28 publications

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

A novel out-of-plane micro-mirror actuator

Thermo-elastic Behavior of Buckled Multi-layered MEMS Bridge: Model and Experiment

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