A novel constrained H 2 optimization algorithm for mechatronics design in flexure-linked biaxial gantry

Ma, Jun; Chen, Silu; Kamaldin, Nazir; Teo, Chek Sing; Tay, Arthur; Mamun, Abdullah Al; Tan, Kok Kiong

doi:10.1016/j.isatra.2017.08.001

Cited by 26 publications

(5 citation statements)

References 32 publications

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“…The nonlinear coupling characteristic is not considered. The same situation can also be found in Ma et al (2017) . Li et al (2011) proposed a synchronous control model of dual-driving system applied on the gantry-type machine tools with travelling bridge.…”

Section: Introductionsupporting

confidence: 69%

Lyapunov approach for motion synchronization of a two-slider system

Dou

2019

Transactions of the Institute of Measurement and Control

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This paper focuses on a novel boundary control design for motion synchronization of a two-slider system. In this system, two sliders are constrained by a flexible beam. The de-synchronization of two sliders will result in the interaction between them. The interaction force is considered as shear force in this paper. Based on the shear force coupling, the system models are derived. In order to obtain an accurate representation, the flexible beam is derived as a distributed parameter system with one partial differential equation. Based on the proposed models, a Lyapunov approach is used to design the boundary control laws for two sliders to realize the synchronization motion. Simulations are provided to illustrated that the proposed method can effectively improve the sync motion performance compared with the cross-coupling method.

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Section: Introductionsupporting

confidence: 69%

Lyapunov approach for motion synchronization of a two-slider system

Dou

2019

Transactions of the Institute of Measurement and Control

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“…Using the developed mathematical model, we optimized the flexure. The objective function was set as (13) in order to obtain low stiffness in the rotational z-direction and high stiffness in the other directions. w1 to w6 represent weighting factors to equalize the effects of different values of stiffness in each direction.…”

Section: Optimizationmentioning

confidence: 99%

“…Therefore, a flexure is installed at the connection points between the sliders moving along the Y-axis and the crossbeam placed on the sliders, allowing relative rotational movement of the crossbeam to the sliders and the air bearings. J. Ma et al [13,14] presented optimized designs of flexures, but contact-type guide mechanisms of the gantry axes were used. In a previous study, one degree of freedom (DOF) flexure was developed to accomplish rotational motion about the Z-axis [15].…”

Section: Introductionmentioning

confidence: 99%

Development of Air Bearing Stage Using Flexure for Yaw Motion Compensation

Lee

Ahn

2022

Actuators

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This paper presents an air bearing stage that uses flexure for yaw motion compensation. The proposed stage realizes motion in three degrees of freedom (DOF), which are the X, Y, and Θz directions. To work with Θz as the rotational motion of the stage, we applied a flexure consisting of four bar linkages. The stage from a previous study in which flexure is applied to compensate for yaw motion error has the limitation of increasing the structural stiffness of the stage due to the rotational stiffness. In this study, we propose a combination of a new stage structure and flexure to ensure the high structural stiffness of the stage and the very low rotational stiffness of the flexure at the same time. Modeling and design optimization were performed to apply adequate flexure to the proposed stage. Experiments were carried out to verify yaw motion error compensation and the performance of the stage. The proposed stage has a maximum yaw motion error of 0.86 arcsec during the scanning motion and 48 ms settling time, while the stepping motion is improved by 34.2% compared to the previous study.

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“…H-type air floating motion platform can realize two degrees of freedom large stroke precise positioning motion and is widely applied in lithography silicon wafer stage, precision measuring equipment, and laser drilling equipment [ 1 , 2 , 3 ]. The platform is directly driven by the linear motor and supported and guided by the air floating guideway, which has the advantages of symmetrical structure and large overall stiffness.…”

Section: Introductionmentioning

confidence: 99%

Model Decoupled Synchronization Control Design with Fractional Order Filter for H-Type Air Floating Motion Platform

Sun

Zeng

Luo

et al. 2021

Entropy

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H-type motion platform with linear motors is widely used in two-degrees-of-freedom motion systems, and one-direction dual motors need to be precisely controlled with strict synchronization for high precision performance. In this paper, a synchronous control method based on model decoupling is proposed. The dynamic model of an H-type air floating motion platform is established and one direction control using two motors with position dependency coupling is decoupled and converted into independent position and rotation controls, separately. For the low damping second-order oscillation system of the rotation control loop, a new fractional order biquad filtering method is proposed to generate an antiresonance peak to improve the phase and control gain of the open loop system, which can ensure system stability and quick attenuation for external disturbances. In the multiple-degree-of-freedom decoupled control loops, a systematic feedback controller design methodology is proposed to satisfy the given frequency domain design specifications; a feed-forward control strategy is also applied to compensate the disturbance torque caused by the platform motion. The simulation and experimental results demonstrate that the proposed synchronization control method is effective, and achieves better disturbance rejection performance than the existing optimal cancellation filtering method and biquad filtering method.

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A novel constrained H 2 optimization algorithm for mechatronics design in flexure-linked biaxial gantry

Cited by 26 publications

References 32 publications

Lyapunov approach for motion synchronization of a two-slider system

Lyapunov approach for motion synchronization of a two-slider system

Development of Air Bearing Stage Using Flexure for Yaw Motion Compensation

Model Decoupled Synchronization Control Design with Fractional Order Filter for H-Type Air Floating Motion Platform

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