Abstract:High performance MEMS gyroscopes can be implemented by embedding in a closed loop controller. For these gyroscopes, the electrostatic controlled force on the proof mass is inherently nonlinear. This study reports a MEMS gyroscope with control capability in which comb drive electrodes are employed as the controlling mechanism to linearize the electrostatic controlled force. To avoid interaction of drive and control comb drive electrodes, another mass has been added to the structure. Consequently, proposed gyros… Show more
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